Method for inferring the mechanical strain of GaN-on-Si epitaxial layers using optical profilometry and finite element analysis

B. F. Spiridon^*, M. Toon, A. Hinz, S. Ghosh, S. M. Fairclough, B. J. E. Guilhabert, M. J. Strain, I. M. Watson, M. D. Dawson, D. J. Wallis, R. A. Oliver

^*Corresponding author for this work

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'Hetero-print': A holistic approach to transfer-printing for heterogeneous integration in manufacturing
Dawson, M., Martin, R., Strain, M., Watson, I. & Guilhabert, B. J. E.
EPSRC (Engineering and Physical Sciences Research Council)
1/06/18 → 31/05/24
Project: Research