Method for inferring the mechanical strain of GaN-on-Si epitaxial layers using optical profilometry and finite element analysis

B. F. Spiridon*, M. Toon, A. Hinz, S. Ghosh, S. M. Fairclough, B. J. E. Guilhabert, M. J. Strain, I. M. Watson, M. D. Dawson, D. J. Wallis, R. A. Oliver

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)
76 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Method for inferring the mechanical strain of GaN-on-Si epitaxial layers using optical profilometry and finite element analysis'. Together they form a unique fingerprint.

Material Science

Engineering