Method for inferring the mechanical strain of GaN-on-Si epitaxial layers using optical profilometry and finite element analysis

B. F. Spiridon, M. Toon, A. Hinz, S. Ghosh, S. M. Fairclough, B. J. E. Guilhabert, M. J. Strain, I. M. Watson, M. D. Dawson, D. J. Wallis, R. A. Oliver

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