MEMS variable optical attenuator with vernier latching mechanism

A. Unamuno, D.G. Uttamchandani

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

A microelectromechanical-systems-based moving fiber variable optical attenuator (VOA) with a Vernier latching mechanism is described in this letter. Controlled misalignment between the end-faces of two optical fibers varies the optical coupling. This is performed using a Chevron-type thermal microactuator which moves one fiber end-face with respect to the other. The moving fiber is latched in positions using a Vernier latching mechanism with 0.5-/spl mu/m step resolution. A prototype VOA has been fabricated using 80-/spl mu/m silicon-on-insulator. Optical power coupled between the two single-mode fibers varied from 3.72 to -44 dBm, and over this range the VOA latched in 30 stable positions. Insertion loss was measured to be 1.05 dB. In the unlatched mode, the 10%-90% and the 90%-10% response times of the system were measured to be 1.7 and 4.8 ms, respectively.
LanguageEnglish
Pages88-90
Number of pages2
JournalIEEE Photonics Technology Letters
Volume18
Issue number1
DOIs
Publication statusPublished - Jan 2006

Fingerprint

attenuators
microelectromechanical systems
MEMS
fibers
Fibers
Microactuators
Silicon
Single mode fibers
Insertion losses
optical coupling
Optical fibers
insertion loss
misalignment
optical fibers
prototypes
insulators
silicon

Keywords

  • micro-optics
  • microactuators
  • optical attenuators
  • optical fibre
  • fabrication
  • optical fibre losses
  • silicon-on-insulator

Cite this

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title = "MEMS variable optical attenuator with vernier latching mechanism",
abstract = "A microelectromechanical-systems-based moving fiber variable optical attenuator (VOA) with a Vernier latching mechanism is described in this letter. Controlled misalignment between the end-faces of two optical fibers varies the optical coupling. This is performed using a Chevron-type thermal microactuator which moves one fiber end-face with respect to the other. The moving fiber is latched in positions using a Vernier latching mechanism with 0.5-/spl mu/m step resolution. A prototype VOA has been fabricated using 80-/spl mu/m silicon-on-insulator. Optical power coupled between the two single-mode fibers varied from 3.72 to -44 dBm, and over this range the VOA latched in 30 stable positions. Insertion loss was measured to be 1.05 dB. In the unlatched mode, the 10{\%}-90{\%} and the 90{\%}-10{\%} response times of the system were measured to be 1.7 and 4.8 ms, respectively.",
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MEMS variable optical attenuator with vernier latching mechanism. / Unamuno, A.; Uttamchandani, D.G.

In: IEEE Photonics Technology Letters, Vol. 18, No. 1, 01.2006, p. 88-90.

Research output: Contribution to journalArticle

TY - JOUR

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AU - Unamuno, A.

AU - Uttamchandani, D.G.

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N2 - A microelectromechanical-systems-based moving fiber variable optical attenuator (VOA) with a Vernier latching mechanism is described in this letter. Controlled misalignment between the end-faces of two optical fibers varies the optical coupling. This is performed using a Chevron-type thermal microactuator which moves one fiber end-face with respect to the other. The moving fiber is latched in positions using a Vernier latching mechanism with 0.5-/spl mu/m step resolution. A prototype VOA has been fabricated using 80-/spl mu/m silicon-on-insulator. Optical power coupled between the two single-mode fibers varied from 3.72 to -44 dBm, and over this range the VOA latched in 30 stable positions. Insertion loss was measured to be 1.05 dB. In the unlatched mode, the 10%-90% and the 90%-10% response times of the system were measured to be 1.7 and 4.8 ms, respectively.

AB - A microelectromechanical-systems-based moving fiber variable optical attenuator (VOA) with a Vernier latching mechanism is described in this letter. Controlled misalignment between the end-faces of two optical fibers varies the optical coupling. This is performed using a Chevron-type thermal microactuator which moves one fiber end-face with respect to the other. The moving fiber is latched in positions using a Vernier latching mechanism with 0.5-/spl mu/m step resolution. A prototype VOA has been fabricated using 80-/spl mu/m silicon-on-insulator. Optical power coupled between the two single-mode fibers varied from 3.72 to -44 dBm, and over this range the VOA latched in 30 stable positions. Insertion loss was measured to be 1.05 dB. In the unlatched mode, the 10%-90% and the 90%-10% response times of the system were measured to be 1.7 and 4.8 ms, respectively.

KW - micro-optics

KW - microactuators

KW - optical attenuators

KW - optical fibre

KW - fabrication

KW - optical fibre losses

KW - silicon-on-insulator

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