MEMS microwave device with switchable capacitive and inductive states

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Abstract

A microwave microelectromechanical system (MEMS) device that can be switched between capacitive and inductive states over the frequency range of 1 to 16 GHz is reported. The device has been designed based on coplanar waveguide architecture, and realised in thickly electroplated nickel with front-side bulk micromachining of the substrate using a commercial foundry process. The capacitive-to-inductive switchover has been achieved by changing the gap of the interdigitated comb fingers using a chevron microactuator. Experimental characterisation of the device has been conducted, and capacitances ~0.2 pF in the frequency range of 1-16 GHz have been measured in the 'off' state (driving voltage of the microactuator is 0 V), whereas inductances ~0.5 nH in the frequency range of 1-16 GHz have been measured in the 'on' state (driving voltage of the microactuator is ~1 V).
Original languageEnglish
Pages (from-to)77-81
Number of pages4
JournalMicro and Nano Letters
Volume3
Issue number3
DOIs
Publication statusPublished - Sep 2008

Keywords

  • capacitors
  • coplanar waveguides
  • inductors
  • micromachining
  • micromechanical devices
  • microwave devices
  • MEMS microwave device
  • capacitive-inductive switchover
  • chevron microactuator
  • commercial foundry process
  • coplanar waveguide architecture
  • electroplated nickel
  • frequency 1 GHz to 16 GHz
  • front-side bulk micromachining
  • interdigitated comb fingers
  • switchable capacitive state
  • switchable inductive state

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