Abstract
A microwave microelectromechanical system (MEMS) device that can be switched between capacitive and inductive states over the frequency range of 1 to 16 GHz is reported. The device has been designed based on coplanar waveguide architecture, and realised in thickly electroplated nickel with front-side bulk micromachining of the substrate using a commercial foundry process. The capacitive-to-inductive switchover has been achieved by changing the gap of the interdigitated comb fingers using a chevron microactuator. Experimental characterisation of the device has been conducted, and capacitances ~0.2 pF in the frequency range of 1-16 GHz have been measured in the 'off' state (driving voltage of the microactuator is 0 V), whereas inductances ~0.5 nH in the frequency range of 1-16 GHz have been measured in the 'on' state (driving voltage of the microactuator is ~1 V).
| Original language | English |
|---|---|
| Pages (from-to) | 77-81 |
| Number of pages | 4 |
| Journal | Micro and Nano Letters |
| Volume | 3 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - Sep 2008 |
Keywords
- capacitors
- coplanar waveguides
- inductors
- micromachining
- micromechanical devices
- microwave devices
- MEMS microwave device
- capacitive-inductive switchover
- chevron microactuator
- commercial foundry process
- coplanar waveguide architecture
- electroplated nickel
- frequency 1 GHz to 16 GHz
- front-side bulk micromachining
- interdigitated comb fingers
- switchable capacitive state
- switchable inductive state