MEMS microwave device with switchable capacitive and inductive states

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

A microwave microelectromechanical system (MEMS) device that can be switched between capacitive and inductive states over the frequency range of 1 to 16 GHz is reported. The device has been designed based on coplanar waveguide architecture, and realised in thickly electroplated nickel with front-side bulk micromachining of the substrate using a commercial foundry process. The capacitive-to-inductive switchover has been achieved by changing the gap of the interdigitated comb fingers using a chevron microactuator. Experimental characterisation of the device has been conducted, and capacitances ~0.2 pF in the frequency range of 1-16 GHz have been measured in the 'off' state (driving voltage of the microactuator is 0 V), whereas inductances ~0.5 nH in the frequency range of 1-16 GHz have been measured in the 'on' state (driving voltage of the microactuator is ~1 V).
LanguageEnglish
Pages77-81
Number of pages4
JournalMicro and Nano Letters
Volume3
Issue number3
DOIs
Publication statusPublished - Sep 2008

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Microactuators
Microwave devices
microelectromechanical systems
MEMS
frequency ranges
Microwaves
microwaves
foundries
Coplanar waveguides
Micromachining
Electric potential
electric potential
Foundries
micromachining
Nickel
inductance
Inductance
Capacitance
capacitance
nickel

Keywords

  • capacitors
  • coplanar waveguides
  • inductors
  • micromachining
  • micromechanical devices
  • microwave devices
  • MEMS microwave device
  • capacitive-inductive switchover
  • chevron microactuator
  • commercial foundry process
  • coplanar waveguide architecture
  • electroplated nickel
  • frequency 1 GHz to 16 GHz
  • front-side bulk micromachining
  • interdigitated comb fingers
  • switchable capacitive state
  • switchable inductive state

Cite this

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title = "MEMS microwave device with switchable capacitive and inductive states",
abstract = "A microwave microelectromechanical system (MEMS) device that can be switched between capacitive and inductive states over the frequency range of 1 to 16 GHz is reported. The device has been designed based on coplanar waveguide architecture, and realised in thickly electroplated nickel with front-side bulk micromachining of the substrate using a commercial foundry process. The capacitive-to-inductive switchover has been achieved by changing the gap of the interdigitated comb fingers using a chevron microactuator. Experimental characterisation of the device has been conducted, and capacitances ~0.2 pF in the frequency range of 1-16 GHz have been measured in the 'off' state (driving voltage of the microactuator is 0 V), whereas inductances ~0.5 nH in the frequency range of 1-16 GHz have been measured in the 'on' state (driving voltage of the microactuator is ~1 V).",
keywords = "capacitors, coplanar waveguides, inductors, micromachining, micromechanical devices, microwave devices, MEMS microwave device, capacitive-inductive switchover, chevron microactuator, commercial foundry process, coplanar waveguide architecture, electroplated nickel, frequency 1 GHz to 16 GHz, front-side bulk micromachining, interdigitated comb fingers, switchable capacitive state, switchable inductive state",
author = "L. Li and D.G. Uttamchandani",
year = "2008",
month = "9",
doi = "10.1049/mnl:20080020",
language = "English",
volume = "3",
pages = "77--81",
journal = "Micro and Nano Letters",
issn = "1750-0443",
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}

MEMS microwave device with switchable capacitive and inductive states. / Li, L.; Uttamchandani, D.G.

In: Micro and Nano Letters, Vol. 3, No. 3, 09.2008, p. 77-81.

Research output: Contribution to journalArticle

TY - JOUR

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AU - Li, L.

AU - Uttamchandani, D.G.

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AB - A microwave microelectromechanical system (MEMS) device that can be switched between capacitive and inductive states over the frequency range of 1 to 16 GHz is reported. The device has been designed based on coplanar waveguide architecture, and realised in thickly electroplated nickel with front-side bulk micromachining of the substrate using a commercial foundry process. The capacitive-to-inductive switchover has been achieved by changing the gap of the interdigitated comb fingers using a chevron microactuator. Experimental characterisation of the device has been conducted, and capacitances ~0.2 pF in the frequency range of 1-16 GHz have been measured in the 'off' state (driving voltage of the microactuator is 0 V), whereas inductances ~0.5 nH in the frequency range of 1-16 GHz have been measured in the 'on' state (driving voltage of the microactuator is ~1 V).

KW - capacitors

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KW - inductors

KW - micromachining

KW - micromechanical devices

KW - microwave devices

KW - MEMS microwave device

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KW - chevron microactuator

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KW - coplanar waveguide architecture

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KW - frequency 1 GHz to 16 GHz

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