MEMS micromirror based light sheet generator for biomedical imaging

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

2 Citations (Scopus)

Abstract

Two MEMS micromirrors with resonant or static actuation are used as a MEMS enabled light sheet generator, with light sheet dimensions of 3.5μm by 550μm and offset positioning of 150μm in the focal plane.
LanguageEnglish
Title of host publication2017 International Conference on Optical MEMS and Nanophotonics (OMN)
Subtitle of host publicationProceedings
Place of PublicationPiscataway, NJ
PublisherIEEE
Number of pages2
ISBN (Electronic)9781538607374
DOIs
Publication statusPublished - 28 Sep 2017
Event22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Santa Fe, United States
Duration: 13 Aug 201717 Aug 2017

Conference

Conference22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017
CountryUnited States
CitySanta Fe
Period13/08/1717/08/17

Fingerprint

microelectromechanical systems
MEMS
generators
Imaging techniques
actuation
positioning

Keywords

  • MEMS
  • micromirror
  • electrostatic and electrothermal actuation
  • lightsheet
  • biomedical imaging
  • miniaturised
  • beam shaping
  • electrostatic
  • comb-drive actuation

Cite this

Bauer, R., & Uttamchandani, D. (2017). MEMS micromirror based light sheet generator for biomedical imaging. In 2017 International Conference on Optical MEMS and Nanophotonics (OMN): Proceedings [8051499] Piscataway, NJ: IEEE. https://doi.org/10.1109/OMN.2017.8051499
Bauer, Ralf ; Uttamchandani, Deepak. / MEMS micromirror based light sheet generator for biomedical imaging. 2017 International Conference on Optical MEMS and Nanophotonics (OMN): Proceedings. Piscataway, NJ : IEEE, 2017.
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Bauer, R & Uttamchandani, D 2017, MEMS micromirror based light sheet generator for biomedical imaging. in 2017 International Conference on Optical MEMS and Nanophotonics (OMN): Proceedings., 8051499, IEEE, Piscataway, NJ, 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017, Santa Fe, United States, 13/08/17. https://doi.org/10.1109/OMN.2017.8051499

MEMS micromirror based light sheet generator for biomedical imaging. / Bauer, Ralf; Uttamchandani, Deepak.

2017 International Conference on Optical MEMS and Nanophotonics (OMN): Proceedings. Piscataway, NJ : IEEE, 2017. 8051499.

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

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Bauer R, Uttamchandani D. MEMS micromirror based light sheet generator for biomedical imaging. In 2017 International Conference on Optical MEMS and Nanophotonics (OMN): Proceedings. Piscataway, NJ: IEEE. 2017. 8051499 https://doi.org/10.1109/OMN.2017.8051499