MEMS micromirror based light sheet generator for biomedical imaging

Ralf Bauer; Deepak Uttamchandani

doi:10.1109/OMN.2017.8051499

MEMS micromirror based light sheet generator for biomedical imaging

Ralf Bauer, Deepak Uttamchandani

Electronic And Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

4 Citations (Scopus)

26 Downloads (Pure)

Abstract

Two MEMS micromirrors with resonant or static actuation are used as a MEMS enabled light sheet generator, with light sheet dimensions of 3.5μm by 550μm and offset positioning of 150μm in the focal plane.

Original language	English
Title of host publication	2017 International Conference on Optical MEMS and Nanophotonics (OMN)
Subtitle of host publication	Proceedings
Place of Publication	Piscataway, NJ
Publisher	IEEE
Number of pages	2
ISBN (Electronic)	9781538607374
DOIs	https://doi.org/10.1109/OMN.2017.8051499
Publication status	Published - 28 Sept 2017
Event	22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Santa Fe, United States Duration: 13 Aug 2017 → 17 Aug 2017

Conference

Conference	22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017
Country/Territory	United States
City	Santa Fe
Period	13/08/17 → 17/08/17

Keywords

MEMS
micromirror
electrostatic and electrothermal actuation
lightsheet
biomedical imaging
miniaturised
beam shaping
electrostatic
comb-drive actuation

Access to Document

10.1109/OMN.2017.8051499

Bauer-Uttamchandani-OMN2017-MEMS-micromirror-based-light-sheet-generator-for-biomedical-imagingAccepted author manuscript, 405 KB

Cite this

@inproceedings{3814bbde21af4183a46e5bbc3d292d0c,

title = "MEMS micromirror based light sheet generator for biomedical imaging",

abstract = "Two MEMS micromirrors with resonant or static actuation are used as a MEMS enabled light sheet generator, with light sheet dimensions of 3.5μm by 550μm and offset positioning of 150μm in the focal plane.",

keywords = "MEMS, micromirror, electrostatic and electrothermal actuation, lightsheet, biomedical imaging, miniaturised, beam shaping, electrostatic, comb-drive actuation",

author = "Ralf Bauer and Deepak Uttamchandani",

note = "{\textcopyright} 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.; 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017 ; Conference date: 13-08-2017 Through 17-08-2017",

year = "2017",

month = sep,

day = "28",

doi = "10.1109/OMN.2017.8051499",

language = "English",

booktitle = "2017 International Conference on Optical MEMS and Nanophotonics (OMN)",

publisher = "IEEE",

}

Bauer, R & Uttamchandani, D 2017, MEMS micromirror based light sheet generator for biomedical imaging. in 2017 International Conference on Optical MEMS and Nanophotonics (OMN): Proceedings., 8051499, IEEE, Piscataway, NJ, 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017, Santa Fe, United States, 13/08/17. https://doi.org/10.1109/OMN.2017.8051499

TY - GEN

T1 - MEMS micromirror based light sheet generator for biomedical imaging

AU - Bauer, Ralf

AU - Uttamchandani, Deepak

N1 - © 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2017/9/28

Y1 - 2017/9/28

N2 - Two MEMS micromirrors with resonant or static actuation are used as a MEMS enabled light sheet generator, with light sheet dimensions of 3.5μm by 550μm and offset positioning of 150μm in the focal plane.

AB - Two MEMS micromirrors with resonant or static actuation are used as a MEMS enabled light sheet generator, with light sheet dimensions of 3.5μm by 550μm and offset positioning of 150μm in the focal plane.

KW - MEMS

KW - micromirror

KW - electrostatic and electrothermal actuation

KW - lightsheet

KW - biomedical imaging

KW - miniaturised

KW - beam shaping

KW - electrostatic

KW - comb-drive actuation

UR - http://www.scopus.com/inward/record.url?scp=85035031584&partnerID=8YFLogxK

UR - http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=8045932

U2 - 10.1109/OMN.2017.8051499

DO - 10.1109/OMN.2017.8051499

M3 - Conference contribution book

AN - SCOPUS:85035031584

BT - 2017 International Conference on Optical MEMS and Nanophotonics (OMN)

PB - IEEE

CY - Piscataway, NJ

T2 - 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017

Y2 - 13 August 2017 through 17 August 2017

ER -

MEMS micromirror based light sheet generator for biomedical imaging

Abstract

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Miniaturised 3D-printed biomedical imaging system using optical MEMS - RAE Fellowships (GCRF)

Light-sheet microscopy beam path miniaturisation using optical MEMS

Talks detailing work in optical MEMS in biomedical imaging and laser systems

Cite this

MEMS micromirror based light sheet generator for biomedical imaging

Abstract

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Projects

Miniaturised 3D-printed biomedical imaging system using optical MEMS - RAE Fellowships (GCRF)

Research output

Light-sheet microscopy beam path miniaturisation using optical MEMS

Activities

Talks detailing work in optical MEMS in biomedical imaging and laser systems

Cite this