MEMS micromirror based light sheet generator for biomedical imaging

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Abstract

Two MEMS micromirrors with resonant or static actuation are used as a MEMS enabled light sheet generator, with light sheet dimensions of 3.5μm by 550μm and offset positioning of 150μm in the focal plane.
Original languageEnglish
Title of host publication2017 International Conference on Optical MEMS and Nanophotonics (OMN)
Subtitle of host publicationProceedings
Place of PublicationPiscataway, NJ
PublisherIEEE
Number of pages2
ISBN (Electronic)9781538607374
DOIs
Publication statusPublished - 28 Sep 2017
Event22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Santa Fe, United States
Duration: 13 Aug 201717 Aug 2017

Conference

Conference22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017
CountryUnited States
CitySanta Fe
Period13/08/1717/08/17

Keywords

  • MEMS
  • micromirror
  • electrostatic and electrothermal actuation
  • lightsheet
  • biomedical imaging
  • miniaturised
  • beam shaping
  • electrostatic
  • comb-drive actuation

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