MEMS enabled control of light-sheet microscopy optical beam paths

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Abstract

The excitation and imaging optical beam paths for the design of a digitally controllable light-sheet microscopy system using a piezoelectric MEMS scanner and a thermal bimorph varifocal MEMS mirror, respectively, are presented.
Original languageEnglish
Title of host publication2018 International Conference on Optical MEMS and Nanophotonics (OMN)
Place of PublicationPiscatawat, NJ.
PublisherIEEE
Number of pages2
ISBN (Electronic)9781509063741
ISBN (Print)9781509063758
DOIs
Publication statusPublished - 6 Sep 2018
EventIEEE International Conference on Optical MEMS and Nanophotonics: OMN2018 - Lausanne, Switzerland
Duration: 29 Jul 20182 Aug 2018

Conference

ConferenceIEEE International Conference on Optical MEMS and Nanophotonics
CountrySwitzerland
CityLausanne
Period29/07/182/08/18

Keywords

  • MEMS
  • micromirror
  • piezoelectric
  • electrothermal
  • biomedical imaging
  • light-sheet microscopy

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    Cite this

    Bakas, S., Uttamchandani, D., Toshiyoshi, H., & Bauer, R. (2018). MEMS enabled control of light-sheet microscopy optical beam paths. In 2018 International Conference on Optical MEMS and Nanophotonics (OMN) Piscatawat, NJ.: IEEE. https://doi.org/10.1109/OMN.2018.8454642