MEMS-actuated wavelength drop filter based on microsphere whispering gallery modes

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MEMS-enabled tuneable optical coupling between optical microsphere resonators and optical fibre waveguides is reported. We describe the design, fabrication and experimental characterization of a MEMS platform, based on electrothermal actuators, which controls the resonator-to-waveguide separation. We compare the simulated and experimental displacements of the actuators in an unloaded and loaded state, where the load is a 1 mm optical spherical resonator. We then demonstrate the proof of concept application of selective wavelength dropping using the MEMS platform by modulating the coupling between the spherical resonator and a tapered optical fibre waveguide.
Original languageEnglish
Article number115020
Number of pages9
JournalJournal of Micromechanics and Microengineering
Issue number11
Publication statusPublished - 14 Oct 2011


  • microsphere whispering gallery
  • optical fibre waveguides
  • fabrication


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