MEMS actuated spherical retroreflector for free-space optical communications

C.R. Jenkins, W. Johnstone, D.G. Uttamchandani, V. Handerek, S. Radcliffe

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

An optical MEMS retroreflective phase modulator comprising a silicon MEMS microactuated platform to which a spherical retroreflector is attached has been investigated. The steady state and dynamic behaviour of the MEMS modulator have been experimentally measured when two different sizes of spherical retroreflectors are used. Dynamic testing shows a dominant resonant frequency response at around 200 Hz, which matches finite-element analysis for the structure.
Original languageEnglish
Pages (from-to)1278-1279
Number of pages1
JournalElectronics Letters
Volume41
Issue number23
DOIs
Publication statusPublished - 2005

Keywords

  • optical communications
  • retroreflective phase modulator
  • finite element analysis

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