Abstract
This paper describes the use of electrothermal MEMS actuation and small-scale spherical retroreflectors to produce a retroreflective optical phase modulator.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the IEEE/LEOS International Conference on Optical MEMS and their Applications Conference, 2005 |
| Publisher | IEEE |
| Pages | S384-S390 |
| Volume | 8 |
| Edition | 3 |
| ISBN (Print) | 0-7803-9278-7 |
| DOIs | |
| Publication status | Published - 2006 |
Keywords
- micro-optics
- microactuators
- optical communication equipment
- optical links
- optical modulation
- phase modulation
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