Abstract
In this paper an efficient method is proposed to measure the geometric dimensions of a microchannel bonded by a transparent top plate by employing the techniques of quick vertical scan of featured surfaces, detailed multi-layer sampling of depth response curves (DRC), and measurement of the refractive index of transparent top plate. The featured surfaces with profile fluctuation in the micro scale are scanned with high vertical resolution. The absolute height of each surface is determined by the peak point of the corresponding DRC. Since the DRCs are only sampled in the central area the processing speed is acceptable even with a large scanning length. The results of the measured depth should be corrected by the refractive index. Only in the same material does the focal point move at the same speed during the scanning motion. In this study an inverse measurement scheme is proposed to calculate the refractive index of a transparent plate without prior calibration. Any measurable steps on the sample surface can be used as the sampling area. By scanning the same area from both sides different sectional profiles can be extracted. The ratio of the different steps is the refractive index.
| Language | English |
|---|---|
| Title of host publication | Seventh International Symposium on Precision Engineering Measurements and Instrumentation |
| Place of Publication | Bellingham, Washington |
| Volume | 8321 |
| DOIs | |
| Publication status | Published - 2011 |
| Externally published | Yes |
| Event | 7th International Symposium on Precision Engineering Measurements and Instrumentation - Lijiang, China Duration: 7 Aug 2011 → 11 Aug 2011 |
Conference
| Conference | 7th International Symposium on Precision Engineering Measurements and Instrumentation |
|---|---|
| Country | China |
| City | Lijiang |
| Period | 7/08/11 → 11/08/11 |
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Keywords
- confocal microscopy
- Depth Response Curve (DRC)
- microchannels
- refractive index calibration
- transparent sample measurement
Cite this
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Measurement of microchannels inside transparent substrate based on confocal microscopy. / Cheng, Fang; Butler, David L.; Fan, Kuang Chao.
Seventh International Symposium on Precision Engineering Measurements and Instrumentation. Vol. 8321 Bellingham, Washington, 2011. 83212D.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book
TY - GEN
T1 - Measurement of microchannels inside transparent substrate based on confocal microscopy
AU - Cheng, Fang
AU - Butler, David L.
AU - Fan, Kuang Chao
PY - 2011
Y1 - 2011
N2 - In this paper an efficient method is proposed to measure the geometric dimensions of a microchannel bonded by a transparent top plate by employing the techniques of quick vertical scan of featured surfaces, detailed multi-layer sampling of depth response curves (DRC), and measurement of the refractive index of transparent top plate. The featured surfaces with profile fluctuation in the micro scale are scanned with high vertical resolution. The absolute height of each surface is determined by the peak point of the corresponding DRC. Since the DRCs are only sampled in the central area the processing speed is acceptable even with a large scanning length. The results of the measured depth should be corrected by the refractive index. Only in the same material does the focal point move at the same speed during the scanning motion. In this study an inverse measurement scheme is proposed to calculate the refractive index of a transparent plate without prior calibration. Any measurable steps on the sample surface can be used as the sampling area. By scanning the same area from both sides different sectional profiles can be extracted. The ratio of the different steps is the refractive index.
AB - In this paper an efficient method is proposed to measure the geometric dimensions of a microchannel bonded by a transparent top plate by employing the techniques of quick vertical scan of featured surfaces, detailed multi-layer sampling of depth response curves (DRC), and measurement of the refractive index of transparent top plate. The featured surfaces with profile fluctuation in the micro scale are scanned with high vertical resolution. The absolute height of each surface is determined by the peak point of the corresponding DRC. Since the DRCs are only sampled in the central area the processing speed is acceptable even with a large scanning length. The results of the measured depth should be corrected by the refractive index. Only in the same material does the focal point move at the same speed during the scanning motion. In this study an inverse measurement scheme is proposed to calculate the refractive index of a transparent plate without prior calibration. Any measurable steps on the sample surface can be used as the sampling area. By scanning the same area from both sides different sectional profiles can be extracted. The ratio of the different steps is the refractive index.
KW - confocal microscopy
KW - Depth Response Curve (DRC)
KW - microchannels
KW - refractive index calibration
KW - transparent sample measurement
UR - http://www.scopus.com/inward/record.url?scp=84855312563&partnerID=8YFLogxK
U2 - 10.1117/12.904999
DO - 10.1117/12.904999
M3 - Conference contribution book
SN - 9780819479402
VL - 8321
BT - Seventh International Symposium on Precision Engineering Measurements and Instrumentation
CY - Bellingham, Washington
ER -