Measurement of microchannels inside transparent substrate based on confocal microscopy

Fang Cheng, David L. Butler, Kuang Chao Fan

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

Abstract

In this paper an efficient method is proposed to measure the geometric dimensions of a microchannel bonded by a transparent top plate by employing the techniques of quick vertical scan of featured surfaces, detailed multi-layer sampling of depth response curves (DRC), and measurement of the refractive index of transparent top plate. The featured surfaces with profile fluctuation in the micro scale are scanned with high vertical resolution. The absolute height of each surface is determined by the peak point of the corresponding DRC. Since the DRCs are only sampled in the central area the processing speed is acceptable even with a large scanning length. The results of the measured depth should be corrected by the refractive index. Only in the same material does the focal point move at the same speed during the scanning motion. In this study an inverse measurement scheme is proposed to calculate the refractive index of a transparent plate without prior calibration. Any measurable steps on the sample surface can be used as the sampling area. By scanning the same area from both sides different sectional profiles can be extracted. The ratio of the different steps is the refractive index.

LanguageEnglish
Title of host publicationSeventh International Symposium on Precision Engineering Measurements and Instrumentation
Place of PublicationBellingham, Washington
Volume8321
DOIs
Publication statusPublished - 2011
Externally publishedYes
Event7th International Symposium on Precision Engineering Measurements and Instrumentation - Lijiang, China
Duration: 7 Aug 201111 Aug 2011

Conference

Conference7th International Symposium on Precision Engineering Measurements and Instrumentation
CountryChina
CityLijiang
Period7/08/1111/08/11

Fingerprint

Confocal Microscopy
Confocal microscopy
Microchannel
microchannels
Microchannels
Refractive Index
Refractive index
Substrate
refractivity
microscopy
Scanning
Substrates
scanning
Discoverer recovery capsules
Vertical
sampling
Sampling
Curve
curves
profiles

Keywords

  • confocal microscopy
  • Depth Response Curve (DRC)
  • microchannels
  • refractive index calibration
  • transparent sample measurement

Cite this

Cheng, F., Butler, D. L., & Fan, K. C. (2011). Measurement of microchannels inside transparent substrate based on confocal microscopy. In Seventh International Symposium on Precision Engineering Measurements and Instrumentation (Vol. 8321). [83212D] Bellingham, Washington. https://doi.org/10.1117/12.904999
Cheng, Fang ; Butler, David L. ; Fan, Kuang Chao. / Measurement of microchannels inside transparent substrate based on confocal microscopy. Seventh International Symposium on Precision Engineering Measurements and Instrumentation. Vol. 8321 Bellingham, Washington, 2011.
@inproceedings{a7d0bca912d4443689cba0a58204e218,
title = "Measurement of microchannels inside transparent substrate based on confocal microscopy",
abstract = "In this paper an efficient method is proposed to measure the geometric dimensions of a microchannel bonded by a transparent top plate by employing the techniques of quick vertical scan of featured surfaces, detailed multi-layer sampling of depth response curves (DRC), and measurement of the refractive index of transparent top plate. The featured surfaces with profile fluctuation in the micro scale are scanned with high vertical resolution. The absolute height of each surface is determined by the peak point of the corresponding DRC. Since the DRCs are only sampled in the central area the processing speed is acceptable even with a large scanning length. The results of the measured depth should be corrected by the refractive index. Only in the same material does the focal point move at the same speed during the scanning motion. In this study an inverse measurement scheme is proposed to calculate the refractive index of a transparent plate without prior calibration. Any measurable steps on the sample surface can be used as the sampling area. By scanning the same area from both sides different sectional profiles can be extracted. The ratio of the different steps is the refractive index.",
keywords = "confocal microscopy, Depth Response Curve (DRC), microchannels, refractive index calibration, transparent sample measurement",
author = "Fang Cheng and Butler, {David L.} and Fan, {Kuang Chao}",
year = "2011",
doi = "10.1117/12.904999",
language = "English",
isbn = "9780819479402",
volume = "8321",
booktitle = "Seventh International Symposium on Precision Engineering Measurements and Instrumentation",

}

Cheng, F, Butler, DL & Fan, KC 2011, Measurement of microchannels inside transparent substrate based on confocal microscopy. in Seventh International Symposium on Precision Engineering Measurements and Instrumentation. vol. 8321, 83212D, Bellingham, Washington, 7th International Symposium on Precision Engineering Measurements and Instrumentation, Lijiang, China, 7/08/11. https://doi.org/10.1117/12.904999

Measurement of microchannels inside transparent substrate based on confocal microscopy. / Cheng, Fang; Butler, David L.; Fan, Kuang Chao.

Seventh International Symposium on Precision Engineering Measurements and Instrumentation. Vol. 8321 Bellingham, Washington, 2011. 83212D.

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

TY - GEN

T1 - Measurement of microchannels inside transparent substrate based on confocal microscopy

AU - Cheng, Fang

AU - Butler, David L.

AU - Fan, Kuang Chao

PY - 2011

Y1 - 2011

N2 - In this paper an efficient method is proposed to measure the geometric dimensions of a microchannel bonded by a transparent top plate by employing the techniques of quick vertical scan of featured surfaces, detailed multi-layer sampling of depth response curves (DRC), and measurement of the refractive index of transparent top plate. The featured surfaces with profile fluctuation in the micro scale are scanned with high vertical resolution. The absolute height of each surface is determined by the peak point of the corresponding DRC. Since the DRCs are only sampled in the central area the processing speed is acceptable even with a large scanning length. The results of the measured depth should be corrected by the refractive index. Only in the same material does the focal point move at the same speed during the scanning motion. In this study an inverse measurement scheme is proposed to calculate the refractive index of a transparent plate without prior calibration. Any measurable steps on the sample surface can be used as the sampling area. By scanning the same area from both sides different sectional profiles can be extracted. The ratio of the different steps is the refractive index.

AB - In this paper an efficient method is proposed to measure the geometric dimensions of a microchannel bonded by a transparent top plate by employing the techniques of quick vertical scan of featured surfaces, detailed multi-layer sampling of depth response curves (DRC), and measurement of the refractive index of transparent top plate. The featured surfaces with profile fluctuation in the micro scale are scanned with high vertical resolution. The absolute height of each surface is determined by the peak point of the corresponding DRC. Since the DRCs are only sampled in the central area the processing speed is acceptable even with a large scanning length. The results of the measured depth should be corrected by the refractive index. Only in the same material does the focal point move at the same speed during the scanning motion. In this study an inverse measurement scheme is proposed to calculate the refractive index of a transparent plate without prior calibration. Any measurable steps on the sample surface can be used as the sampling area. By scanning the same area from both sides different sectional profiles can be extracted. The ratio of the different steps is the refractive index.

KW - confocal microscopy

KW - Depth Response Curve (DRC)

KW - microchannels

KW - refractive index calibration

KW - transparent sample measurement

UR - http://www.scopus.com/inward/record.url?scp=84855312563&partnerID=8YFLogxK

U2 - 10.1117/12.904999

DO - 10.1117/12.904999

M3 - Conference contribution book

SN - 9780819479402

VL - 8321

BT - Seventh International Symposium on Precision Engineering Measurements and Instrumentation

CY - Bellingham, Washington

ER -

Cheng F, Butler DL, Fan KC. Measurement of microchannels inside transparent substrate based on confocal microscopy. In Seventh International Symposium on Precision Engineering Measurements and Instrumentation. Vol. 8321. Bellingham, Washington. 2011. 83212D https://doi.org/10.1117/12.904999