Material and method for printing high conductivity electrical conductors and other components of thin film transistor arrays

P. H. Kydd (Inventor), S. Wagner (Inventor), H. Gleskova (Inventor)

Research output: Patent

Abstract

A process sequence is disclosed for fabricating arrays of Thin Film Transistors by printing metallic conductors for the gate and data lines and possibly the Indium Tin Oxide Pixel electrode as well. The process eliminates conventional step-and-repeat photolithographic patterning, and provides high conductivity metallization for large arrays. These arrays may be used in displays, detectors and scanners.
LanguageEnglish
Patent numberUS6274412
IPCG01G 336
Publication statusPublished - 14 Aug 2001

Fingerprint

printing
transistors
conductors
electrical resistivity
thin films
indium oxides
tin oxides
scanners
pixels
conductivity
electrodes
detectors

Keywords

  • thin film transistors
  • metallic conductors
  • metallization

Cite this

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Material and method for printing high conductivity electrical conductors and other components of thin film transistor arrays. / Kydd, P. H. (Inventor); Wagner, S. (Inventor); Gleskova, H. (Inventor).

IPC No.: G01G 336. Patent No.: US6274412.

Research output: Patent

TY - PAT

T1 - Material and method for printing high conductivity electrical conductors and other components of thin film transistor arrays

AU - Kydd, P. H.

AU - Wagner, S.

AU - Gleskova, H.

PY - 2001/8/14

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N2 - A process sequence is disclosed for fabricating arrays of Thin Film Transistors by printing metallic conductors for the gate and data lines and possibly the Indium Tin Oxide Pixel electrode as well. The process eliminates conventional step-and-repeat photolithographic patterning, and provides high conductivity metallization for large arrays. These arrays may be used in displays, detectors and scanners.

AB - A process sequence is disclosed for fabricating arrays of Thin Film Transistors by printing metallic conductors for the gate and data lines and possibly the Indium Tin Oxide Pixel electrode as well. The process eliminates conventional step-and-repeat photolithographic patterning, and provides high conductivity metallization for large arrays. These arrays may be used in displays, detectors and scanners.

KW - thin film transistors

KW - metallic conductors

KW - metallization

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