Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses

E. Gu, C.W. Jeon, M.D. Dawson

Research output: Contribution to conferencePaper

Abstract

This paper is about mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. It was presented at the European materials research society sprint meeting in 2005.

Conference

ConferenceEuropean Materials Research Society 2005 Spring Meeting
CityStrasbourg, France
Period31/05/053/06/05

Fingerprint

photolithography
light emitting diodes
masks
lenses
matrices

Keywords

  • photolithography
  • ultraviolet LED
  • LED
  • micro-lenses

Cite this

Gu, E., Jeon, C. W., & Dawson, M. D. (2005). Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. Paper presented at European Materials Research Society 2005 Spring Meeting, Strasbourg, France, .
Gu, E. ; Jeon, C.W. ; Dawson, M.D. / Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. Paper presented at European Materials Research Society 2005 Spring Meeting, Strasbourg, France, .
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title = "Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses",
abstract = "This paper is about mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. It was presented at the European materials research society sprint meeting in 2005.",
keywords = "photolithography, ultraviolet LED, LED, micro-lenses",
author = "E. Gu and C.W. Jeon and M.D. Dawson",
year = "2005",
month = "6",
day = "2",
language = "English",
note = "European Materials Research Society 2005 Spring Meeting ; Conference date: 31-05-2005 Through 03-06-2005",

}

Gu, E, Jeon, CW & Dawson, MD 2005, 'Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses' Paper presented at European Materials Research Society 2005 Spring Meeting, Strasbourg, France, 31/05/05 - 3/06/05, .

Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. / Gu, E.; Jeon, C.W.; Dawson, M.D.

2005. Paper presented at European Materials Research Society 2005 Spring Meeting, Strasbourg, France, .

Research output: Contribution to conferencePaper

TY - CONF

T1 - Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses

AU - Gu, E.

AU - Jeon, C.W.

AU - Dawson, M.D.

PY - 2005/6/2

Y1 - 2005/6/2

N2 - This paper is about mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. It was presented at the European materials research society sprint meeting in 2005.

AB - This paper is about mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. It was presented at the European materials research society sprint meeting in 2005.

KW - photolithography

KW - ultraviolet LED

KW - LED

KW - micro-lenses

UR - http://www.emrs-strasbourg.com/files/pdf/2005_SPRING/program/Jmini.pdf

M3 - Paper

ER -

Gu E, Jeon CW, Dawson MD. Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. 2005. Paper presented at European Materials Research Society 2005 Spring Meeting, Strasbourg, France, .