Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses

E. Gu, C.W. Jeon, M.D. Dawson

Research output: Contribution to conferencePaper

Abstract

This paper is about mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. It was presented at the European materials research society sprint meeting in 2005.
Original languageEnglish
Publication statusUnpublished - 2 Jun 2005
EventEuropean Materials Research Society 2005 Spring Meeting - Strasbourg, France
Duration: 31 May 20053 Jun 2005

Conference

ConferenceEuropean Materials Research Society 2005 Spring Meeting
CityStrasbourg, France
Period31/05/053/06/05

Keywords

  • photolithography
  • ultraviolet LED
  • LED
  • micro-lenses

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