This paper is about mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. It was presented at the European materials research society sprint meeting in 2005.
|Publication status||Unpublished - 2 Jun 2005|
|Event||European Materials Research Society 2005 Spring Meeting - Strasbourg, France|
Duration: 31 May 2005 → 3 Jun 2005
|Conference||European Materials Research Society 2005 Spring Meeting|
|Period||31/05/05 → 3/06/05|
- ultraviolet LED