Macroparticle induced corrosion for arc bond sputtering CrN/Nbn superlattice coatings

H.W. Wang, M.M. Stack, P. Hovsepian

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Transition metal nitride (TMxNy ) coatings prepared by physical vapor deposition (PVD) techniques have proven to be highly wear and corrosion resistant, thanks to the excellent combination of high hardness, electrical and thermal conductivity, and electrochemical nobility. Although a mere monolayer of binary TiNor CrN could have remarkable effect on increasing a machining tool's life in the early days, more complex ternary or higher coatings, with a functional base layer, or consisting of multiple layers, have been explored subsequently for enhanced performances in wear or corrosion. As for the coating techniques, while the traditionally classified evaporation deposition, sputter deposition, and ion plating (using relatively low keV ion beams to assist vapor deposition) have all been enjoying some success in achieving particular coating properties, recent years have seen the emergence of a particular promising sputter deposition technique, namely the arc bond sputtering (ABSTM), which combines the cathodic arc evaporation and unbalanced magnetron sputtering (UBM) in one process [1].
LanguageEnglish
Pages1995-1997
Number of pages2
JournalJournal of Materials Science Letters
Volume20
Issue number21
DOIs
Publication statusPublished - 2001

Fingerprint

Sputtering
Sputter deposition
Corrosion
Coatings
Evaporation
Wear of materials
Vapor deposition
Coating techniques
Physical vapor deposition
Plating
Nitrides
Magnetron sputtering
Ion beams
Transition metals
Monolayers
Thermal conductivity
Machining
Hardness
Ions
Electric Conductivity

Keywords

  • oxidation
  • materials science
  • corrosion
  • conductivity

Cite this

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abstract = "Transition metal nitride (TMxNy ) coatings prepared by physical vapor deposition (PVD) techniques have proven to be highly wear and corrosion resistant, thanks to the excellent combination of high hardness, electrical and thermal conductivity, and electrochemical nobility. Although a mere monolayer of binary TiNor CrN could have remarkable effect on increasing a machining tool's life in the early days, more complex ternary or higher coatings, with a functional base layer, or consisting of multiple layers, have been explored subsequently for enhanced performances in wear or corrosion. As for the coating techniques, while the traditionally classified evaporation deposition, sputter deposition, and ion plating (using relatively low keV ion beams to assist vapor deposition) have all been enjoying some success in achieving particular coating properties, recent years have seen the emergence of a particular promising sputter deposition technique, namely the arc bond sputtering (ABSTM), which combines the cathodic arc evaporation and unbalanced magnetron sputtering (UBM) in one process [1].",
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Macroparticle induced corrosion for arc bond sputtering CrN/Nbn superlattice coatings. / Wang, H.W.; Stack, M.M.; Hovsepian, P.

In: Journal of Materials Science Letters, Vol. 20, No. 21, 2001, p. 1995-1997.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Macroparticle induced corrosion for arc bond sputtering CrN/Nbn superlattice coatings

AU - Wang, H.W.

AU - Stack, M.M.

AU - Hovsepian, P.

PY - 2001

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N2 - Transition metal nitride (TMxNy ) coatings prepared by physical vapor deposition (PVD) techniques have proven to be highly wear and corrosion resistant, thanks to the excellent combination of high hardness, electrical and thermal conductivity, and electrochemical nobility. Although a mere monolayer of binary TiNor CrN could have remarkable effect on increasing a machining tool's life in the early days, more complex ternary or higher coatings, with a functional base layer, or consisting of multiple layers, have been explored subsequently for enhanced performances in wear or corrosion. As for the coating techniques, while the traditionally classified evaporation deposition, sputter deposition, and ion plating (using relatively low keV ion beams to assist vapor deposition) have all been enjoying some success in achieving particular coating properties, recent years have seen the emergence of a particular promising sputter deposition technique, namely the arc bond sputtering (ABSTM), which combines the cathodic arc evaporation and unbalanced magnetron sputtering (UBM) in one process [1].

AB - Transition metal nitride (TMxNy ) coatings prepared by physical vapor deposition (PVD) techniques have proven to be highly wear and corrosion resistant, thanks to the excellent combination of high hardness, electrical and thermal conductivity, and electrochemical nobility. Although a mere monolayer of binary TiNor CrN could have remarkable effect on increasing a machining tool's life in the early days, more complex ternary or higher coatings, with a functional base layer, or consisting of multiple layers, have been explored subsequently for enhanced performances in wear or corrosion. As for the coating techniques, while the traditionally classified evaporation deposition, sputter deposition, and ion plating (using relatively low keV ion beams to assist vapor deposition) have all been enjoying some success in achieving particular coating properties, recent years have seen the emergence of a particular promising sputter deposition technique, namely the arc bond sputtering (ABSTM), which combines the cathodic arc evaporation and unbalanced magnetron sputtering (UBM) in one process [1].

KW - oxidation

KW - materials science

KW - corrosion

KW - conductivity

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