Machining with micro-size single crystalline diamond tools fabricated by a focused ion beam

X Ding, D L Butler, G C Lim, C K Cheng, K C Shaw, K Liu, W S Fong, H Y Zheng

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

A study was carried out to understand the physics of micro-scale mechanical machining (henceforth referred to as 'micro-machining') with a micro-size tool using a five-axis ultra-precision machine. A micro-size single crystalline diamond (SCD) tool with sharp cutting edges fabricated by a focused ion beam (FIB) was employed to orthogonal-machine four materials (three polycrystalline metals with various grain sizes and one amorphous metal plating material). Since the wealth of knowledge of macro-machining cannot be successfully used in micro-machining, this study contributes to the understanding of the physics of mechanical machining with micro-size tools.

LanguageEnglish
Article number025005
Number of pages11
JournalJournal of Micromechanics and Microengineering
Volume19
Issue number2
DOIs
Publication statusPublished - 14 Jan 2009
Externally publishedYes

Fingerprint

Diamond
Focused ion beams
Diamonds
Machining
Crystalline materials
Physics
Plating
Macros
Metals

Keywords

  • micro-scale mechanical machining
  • micro-machining
  • micro tools
  • cutting mechanisms

Cite this

Ding, X ; Butler, D L ; Lim, G C ; Cheng, C K ; Shaw, K C ; Liu, K ; Fong, W S ; Zheng, H Y. / Machining with micro-size single crystalline diamond tools fabricated by a focused ion beam. In: Journal of Micromechanics and Microengineering. 2009 ; Vol. 19, No. 2.
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Machining with micro-size single crystalline diamond tools fabricated by a focused ion beam. / Ding, X; Butler, D L; Lim, G C; Cheng, C K; Shaw, K C; Liu, K; Fong, W S; Zheng, H Y.

In: Journal of Micromechanics and Microengineering, Vol. 19, No. 2, 025005, 14.01.2009.

Research output: Contribution to journalArticle

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