Low temperature growth and optical properties of α-Ga2O3 deposited on sapphire by plasma enhanced atomic layer deposition

J.W. Roberts, P.R. Chalker, B. Ding, R.A. Oliver, J.T. Gibbon, L.A.H. Jones, V.R. Dhanak, L.J. Phillips, J.D. Major, F.C.-P. Massabuau

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