Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers

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Abstract

The design and fabrication of large radii of curvature micro-lenses in single crystal chemical vapour deposition diamond is described. An optimised photoresist reflow process and low selectivity inductively coupled plasma etching are used to actualize a uniform array of micro-lenses with radii of curvature of 13 mm or more and a high quality surface of a root-mean-square roughness of 0.18 nm. The processes developed have the potential to achieve diamond micro-lenses with an even larger radius of curvature. These new diamond micro-lenses enable the pulse energy scalable monolithic diamond Raman laser where a large radius of curvature of the micro-lenses is critical.

LanguageEnglish
Pages37-41
Number of pages5
JournalDiamond and Related Materials
Volume65
Early online date22 Jan 2016
DOIs
Publication statusPublished - 1 May 2016

Fingerprint

Diamond
Raman lasers
Lenses
Diamonds
diamonds
lenses
curvature
Single crystals
radii
Lasers
single crystals
Plasma etching
Inductively coupled plasma
plasma etching
Photoresists
photoresists
Surface properties
Chemical vapor deposition
Laser pulses
roughness

Keywords

  • inductively coupled plasma etching
  • micro-lens
  • monolithic diamond Raman lasers
  • radius of curvature
  • single crystal diamond

Cite this

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title = "Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers",
abstract = "The design and fabrication of large radii of curvature micro-lenses in single crystal chemical vapour deposition diamond is described. An optimised photoresist reflow process and low selectivity inductively coupled plasma etching are used to actualize a uniform array of micro-lenses with radii of curvature of 13 mm or more and a high quality surface of a root-mean-square roughness of 0.18 nm. The processes developed have the potential to achieve diamond micro-lenses with an even larger radius of curvature. These new diamond micro-lenses enable the pulse energy scalable monolithic diamond Raman laser where a large radius of curvature of the micro-lenses is critical.",
keywords = "inductively coupled plasma etching, micro-lens, monolithic diamond Raman lasers, radius of curvature, single crystal diamond",
author = "Hangyu Liu and Sean Reilly and Johannes Herrnsdorf and Enyuan Xie and Savitski, {Vasili G.} and Kemp, {Alan J.} and Erdan Gu and Dawson, {Martin D.}",
year = "2016",
month = "5",
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doi = "10.1016/j.diamond.2016.01.016",
language = "English",
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T1 - Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers

AU - Liu, Hangyu

AU - Reilly, Sean

AU - Herrnsdorf, Johannes

AU - Xie, Enyuan

AU - Savitski, Vasili G.

AU - Kemp, Alan J.

AU - Gu, Erdan

AU - Dawson, Martin D.

PY - 2016/5/1

Y1 - 2016/5/1

N2 - The design and fabrication of large radii of curvature micro-lenses in single crystal chemical vapour deposition diamond is described. An optimised photoresist reflow process and low selectivity inductively coupled plasma etching are used to actualize a uniform array of micro-lenses with radii of curvature of 13 mm or more and a high quality surface of a root-mean-square roughness of 0.18 nm. The processes developed have the potential to achieve diamond micro-lenses with an even larger radius of curvature. These new diamond micro-lenses enable the pulse energy scalable monolithic diamond Raman laser where a large radius of curvature of the micro-lenses is critical.

AB - The design and fabrication of large radii of curvature micro-lenses in single crystal chemical vapour deposition diamond is described. An optimised photoresist reflow process and low selectivity inductively coupled plasma etching are used to actualize a uniform array of micro-lenses with radii of curvature of 13 mm or more and a high quality surface of a root-mean-square roughness of 0.18 nm. The processes developed have the potential to achieve diamond micro-lenses with an even larger radius of curvature. These new diamond micro-lenses enable the pulse energy scalable monolithic diamond Raman laser where a large radius of curvature of the micro-lenses is critical.

KW - inductively coupled plasma etching

KW - micro-lens

KW - monolithic diamond Raman lasers

KW - radius of curvature

KW - single crystal diamond

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U2 - 10.1016/j.diamond.2016.01.016

DO - 10.1016/j.diamond.2016.01.016

M3 - Article

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SP - 37

EP - 41

JO - Diamond and Related Materials

T2 - Diamond and Related Materials

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SN - 0925-9635

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