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The design and fabrication of large radii of curvature micro-lenses in single crystal chemical vapour deposition diamond is described. An optimised photoresist reflow process and low selectivity inductively coupled plasma etching are used to actualize a uniform array of micro-lenses with radii of curvature of 13 mm or more and a high quality surface of a root-mean-square roughness of 0.18 nm. The processes developed have the potential to achieve diamond micro-lenses with an even larger radius of curvature. These new diamond micro-lenses enable the pulse energy scalable monolithic diamond Raman laser where a large radius of curvature of the micro-lenses is critical.
- inductively coupled plasma etching
- monolithic diamond Raman lasers
- radius of curvature
- single crystal diamond
FingerprintDive into the research topics of 'Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers'. Together they form a unique fingerprint.
- 2 Finished
1/02/14 → 31/12/19
Kemp, A., Birch, R., Casula, R., Fraczek, E., Paboeuf, D., Parrotta, D. C., Reilly, S., Roth, P. & Savitski, V.
1/10/11 → 30/09/16
Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers
Liu, H. (Creator) & Gu, E. (Supervisor), University of Strathclyde, 30 Sep 2016