Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers

Hangyu Liu; Sean Reilly; Johannes Herrnsdorf; Enyuan Xie; Vasili G. Savitski; Alan J. Kemp; Erdan Gu; Martin D. Dawson

doi:10.1016/j.diamond.2016.01.016

Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers

Hangyu Liu, Sean Reilly, Johannes Herrnsdorf, Enyuan Xie, Vasili G. Savitski, Alan J. Kemp, Erdan Gu, Martin D. Dawson

Institute Of Photonics

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Abstract

The design and fabrication of large radii of curvature micro-lenses in single crystal chemical vapour deposition diamond is described. An optimised photoresist reflow process and low selectivity inductively coupled plasma etching are used to actualize a uniform array of micro-lenses with radii of curvature of 13 mm or more and a high quality surface of a root-mean-square roughness of 0.18 nm. The processes developed have the potential to achieve diamond micro-lenses with an even larger radius of curvature. These new diamond micro-lenses enable the pulse energy scalable monolithic diamond Raman laser where a large radius of curvature of the micro-lenses is critical.

Original language	English
Pages (from-to)	37-41
Number of pages	5
Journal	Diamond and Related Materials
Volume	65
Early online date	22 Jan 2016
DOIs	https://doi.org/10.1016/j.diamond.2016.01.016
Publication status	Published - 1 May 2016

Keywords

inductively coupled plasma etching
micro-lens
monolithic diamond Raman lasers
radius of curvature
single crystal diamond

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10.1016/j.diamond.2016.01.016

Liu-etal-DRM2016-large-radius-of-curvature-micro-lenses-on-single-crystal-diamondFinal published version, 1.06 MBLicence: CC BY 4.0

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title = "Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers",

abstract = "The design and fabrication of large radii of curvature micro-lenses in single crystal chemical vapour deposition diamond is described. An optimised photoresist reflow process and low selectivity inductively coupled plasma etching are used to actualize a uniform array of micro-lenses with radii of curvature of 13 mm or more and a high quality surface of a root-mean-square roughness of 0.18 nm. The processes developed have the potential to achieve diamond micro-lenses with an even larger radius of curvature. These new diamond micro-lenses enable the pulse energy scalable monolithic diamond Raman laser where a large radius of curvature of the micro-lenses is critical.",

keywords = "inductively coupled plasma etching, micro-lens, monolithic diamond Raman lasers, radius of curvature, single crystal diamond",

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doi = "10.1016/j.diamond.2016.01.016",

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T1 - Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers

AU - Liu, Hangyu

AU - Reilly, Sean

AU - Herrnsdorf, Johannes

AU - Xie, Enyuan

AU - Savitski, Vasili G.

AU - Kemp, Alan J.

AU - Gu, Erdan

AU - Dawson, Martin D.

PY - 2016/5/1

Y1 - 2016/5/1

N2 - The design and fabrication of large radii of curvature micro-lenses in single crystal chemical vapour deposition diamond is described. An optimised photoresist reflow process and low selectivity inductively coupled plasma etching are used to actualize a uniform array of micro-lenses with radii of curvature of 13 mm or more and a high quality surface of a root-mean-square roughness of 0.18 nm. The processes developed have the potential to achieve diamond micro-lenses with an even larger radius of curvature. These new diamond micro-lenses enable the pulse energy scalable monolithic diamond Raman laser where a large radius of curvature of the micro-lenses is critical.

AB - The design and fabrication of large radii of curvature micro-lenses in single crystal chemical vapour deposition diamond is described. An optimised photoresist reflow process and low selectivity inductively coupled plasma etching are used to actualize a uniform array of micro-lenses with radii of curvature of 13 mm or more and a high quality surface of a root-mean-square roughness of 0.18 nm. The processes developed have the potential to achieve diamond micro-lenses with an even larger radius of curvature. These new diamond micro-lenses enable the pulse energy scalable monolithic diamond Raman laser where a large radius of curvature of the micro-lenses is critical.

KW - inductively coupled plasma etching

KW - micro-lens

KW - monolithic diamond Raman lasers

KW - radius of curvature

KW - single crystal diamond

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U2 - 10.1016/j.diamond.2016.01.016

DO - 10.1016/j.diamond.2016.01.016

M3 - Article

AN - SCOPUS:84955600327

SN - 0925-9635

VL - 65

SP - 37

EP - 41

JO - Diamond and Related Materials

JF - Diamond and Related Materials

ER -

Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers

Abstract

Keywords

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Johannes Herrnsdorf

RAEng/Fraunhofer Research Chair in Advanced Laser Engineering

DIAL (Diamond Lasers: Revolutionising Laser Engineering) - ERC Starting Grant)