Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers

Hangyu Liu; Sean Reilly; Johannes Herrnsdorf; Enyuan Xie; Vasili G. Savitski; Alan J. Kemp; Erdan Gu; Martin D. Dawson

doi:10.1016/j.diamond.2016.01.016

Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers

Hangyu Liu, Sean Reilly, Johannes Herrnsdorf, Enyuan Xie, Vasili G. Savitski, Alan J. Kemp, Erdan Gu^*, Martin D. Dawson

^*Corresponding author for this work

Institute Of Photonics

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Abstract

The design and fabrication of large radii of curvature micro-lenses in single crystal chemical vapour deposition diamond is described. An optimised photoresist reflow process and low selectivity inductively coupled plasma etching are used to actualize a uniform array of micro-lenses with radii of curvature of 13 mm or more and a high quality surface of a root-mean-square roughness of 0.18 nm. The processes developed have the potential to achieve diamond micro-lenses with an even larger radius of curvature. These new diamond micro-lenses enable the pulse energy scalable monolithic diamond Raman laser where a large radius of curvature of the micro-lenses is critical.

Original language	English
Pages (from-to)	37-41
Number of pages	5
Journal	Diamond and Related Materials
Volume	65
Early online date	22 Jan 2016
DOIs	https://doi.org/10.1016/j.diamond.2016.01.016
Publication status	Published - 1 May 2016

Keywords

inductively coupled plasma etching
micro-lens
monolithic diamond Raman lasers
radius of curvature
single crystal diamond

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10.1016/j.diamond.2016.01.016

Liu-etal-DRM2016-large-radius-of-curvature-micro-lenses-on-single-crystal-diamondFinal published version, 1.06 MBLicence: CC BY 4.0

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title = "Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers",

abstract = "The design and fabrication of large radii of curvature micro-lenses in single crystal chemical vapour deposition diamond is described. An optimised photoresist reflow process and low selectivity inductively coupled plasma etching are used to actualize a uniform array of micro-lenses with radii of curvature of 13 mm or more and a high quality surface of a root-mean-square roughness of 0.18 nm. The processes developed have the potential to achieve diamond micro-lenses with an even larger radius of curvature. These new diamond micro-lenses enable the pulse energy scalable monolithic diamond Raman laser where a large radius of curvature of the micro-lenses is critical.",

keywords = "inductively coupled plasma etching, micro-lens, monolithic diamond Raman lasers, radius of curvature, single crystal diamond",

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doi = "10.1016/j.diamond.2016.01.016",

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T1 - Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers

AU - Liu, Hangyu

AU - Reilly, Sean

AU - Herrnsdorf, Johannes

AU - Xie, Enyuan

AU - Savitski, Vasili G.

AU - Kemp, Alan J.

AU - Gu, Erdan

AU - Dawson, Martin D.

PY - 2016/5/1

Y1 - 2016/5/1

N2 - The design and fabrication of large radii of curvature micro-lenses in single crystal chemical vapour deposition diamond is described. An optimised photoresist reflow process and low selectivity inductively coupled plasma etching are used to actualize a uniform array of micro-lenses with radii of curvature of 13 mm or more and a high quality surface of a root-mean-square roughness of 0.18 nm. The processes developed have the potential to achieve diamond micro-lenses with an even larger radius of curvature. These new diamond micro-lenses enable the pulse energy scalable monolithic diamond Raman laser where a large radius of curvature of the micro-lenses is critical.

AB - The design and fabrication of large radii of curvature micro-lenses in single crystal chemical vapour deposition diamond is described. An optimised photoresist reflow process and low selectivity inductively coupled plasma etching are used to actualize a uniform array of micro-lenses with radii of curvature of 13 mm or more and a high quality surface of a root-mean-square roughness of 0.18 nm. The processes developed have the potential to achieve diamond micro-lenses with an even larger radius of curvature. These new diamond micro-lenses enable the pulse energy scalable monolithic diamond Raman laser where a large radius of curvature of the micro-lenses is critical.

KW - inductively coupled plasma etching

KW - micro-lens

KW - monolithic diamond Raman lasers

KW - radius of curvature

KW - single crystal diamond

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U2 - 10.1016/j.diamond.2016.01.016

DO - 10.1016/j.diamond.2016.01.016

M3 - Article

AN - SCOPUS:84955600327

SN - 0925-9635

VL - 65

SP - 37

EP - 41

JO - Diamond and Related Materials

JF - Diamond and Related Materials

ER -

Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers

Abstract

Keywords

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Johannes Herrnsdorf

RAEng/Fraunhofer Research Chair in Advanced Laser Engineering

DIAL (Diamond Lasers: Revolutionising Laser Engineering) - ERC Starting Grant)