Large cross-section edge-coupled diamond waveguides

Yanfeng Zhang, Loyd McKnight, Zhaoshuo Tian, Stephane Calvez, Erdan Gu, Martin D. Dawson

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

A new approach to fabricate large cross-section edge-coupled waveguides on free-standing thin diamond substrates is reported. Combining inkjet printing of photoresist multilayers with photolithographic patterning, both edge and 'coffee stain' effects were successfully eliminated, allowing the fabrication of well-defined, millimetre-scale uniform photoresist micro-stripes which extend to the very edge of the diamond substrate. Subsequent transfer of these micro-stripe structures into diamond by inductively coupled plasma (ICP) etching allowed long edge-coupled waveguides in diamond to be made. Guided wave propagation in these diamond waveguides was also confirmed. (C) 2011 Elsevier B.V. All rights reserved.

Original languageEnglish
Pages (from-to)564-567
Number of pages4
JournalDiamond and Related Materials
Volume20
Issue number4
DOIs
Publication statusPublished - Apr 2011

Keywords

  • diamond
  • waveguide
  • inkjet printing
  • plasma etching
  • nanocrystals

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