Kinetics of recovery of the light-induced defects in hydrogenated amorphous silicon under illumination

H. Gleskova, P. A. Morin, S. Wagner

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The results of a study of the kinetics of the light‐induced annealing of defects in hydrogenated amorphous silicon (a‐Si:H) are presented. Our results show that at temperatures between 92 and 152 °C illumination increases the rate of annealing compared to annealing in the dark. The rates of annealing in the dark and under illumination exhibit the same functional dependence on the defect density. This observation suggests that the mechanisms for ‘‘dark’’ and ‘‘light’’ annealing are identical.
Original languageEnglish
Pages (from-to)2063-2065
Number of pages3
JournalApplied Physics Letters
Issue number17
Publication statusPublished - 1993


  • amorphous state
  • annealing
  • hydrogen additions
  • kinetics

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