Abstract
The results of a study of the kinetics of the light-induced annealing of defects in hydrogenated amorphous silicon (a-Si:H) at the temperature of 125°C are presented. The rate of removal of the metastable defects and the final steady-state defect density both increase with light intensity. The functional dependence of the light-induced annealing term on the light intensity, or carrier generation rate G, is proportional to G0.66−0.84, and thus is proportional to the density of the photo-generated carriers.
Original language | English |
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Pages (from-to) | 183-186 |
Number of pages | 4 |
Journal | Journal of Non-Crystalline Solids |
Volume | 164-166 |
Issue number | PART 1 |
DOIs | |
Publication status | Published - 2 Dec 1993 |
Event | 15th International Conference on Amorphous Semiconductors - Cambridge , United Kingdom Duration: 6 Sept 1993 → 10 Sept 1993 |
Keywords
- non-crystalline solids
- light-induced annealing
- annealing
- metastable defects