Investigation of electrical, structural, and optical properties of very thin oxide/a-Si:H/c-Si interfaces passivated by cyanide treatment

E.  Pincik; H. Kobayashi; S. Jurecka; M.  Jergel; H. Gleskova; M.  Takahashi; R. Brunner; N. Fujiwara; J. Mullerova

Investigation of electrical, structural, and optical properties of very thin oxide/a-Si:H/c-Si interfaces passivated by cyanide treatment

E. Pincik, H. Kobayashi, S. Jurecka, M. Jergel , H. Gleskova, M. Takahashi, R. Brunner, N. Fujiwara, J. Mullerova

Electronic And Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

Abstract

This chapter looks at the investigation of electrical, structural, and optical properties of very thin oxide/a-Si:H/c-Si interfaces passivated by cyanide treatment

Original language	English
Title of host publication	Proccedings of the fifth international conference on thin film physics and applications
Editors	J. Chu, Z. Lai, L. Wang, S. Xu
Place of Publication	Bellingham, WA
Pages	481-488
Number of pages	8
Volume	5774
Publication status	Published - 2004
Event	Fifth International Conference on Thin Film Physics and Applications - Shanghai, China Duration: 31 May 2004 → 2 Jun 2004

Conference

Conference	Fifth International Conference on Thin Film Physics and Applications
Country/Territory	China
City	Shanghai
Period	31/05/04 → 2/06/04

Keywords

investigation
electrical
structural
optical properties
very thin oxide
cyanide treatment

Cite this

Pincik, E., Kobayashi, H., Jurecka, S., Jergel , M., Gleskova, H., Takahashi, M., Brunner, R., Fujiwara, N., & Mullerova, J. (2004). Investigation of electrical, structural, and optical properties of very thin oxide/a-Si:H/c-Si interfaces passivated by cyanide treatment. In J. Chu, Z. Lai, L. Wang, & S. Xu (Eds.), Proccedings of the fifth international conference on thin film physics and applications (Vol. 5774, pp. 481-488).

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title = "Investigation of electrical, structural, and optical properties of very thin oxide/a-Si:H/c-Si interfaces passivated by cyanide treatment",

abstract = "This chapter looks at the investigation of electrical, structural, and optical properties of very thin oxide/a-Si:H/c-Si interfaces passivated by cyanide treatment",

keywords = "investigation, electrical, structural, optical properties, very thin oxide, cyanide treatment",

author = "E. Pincik and H. Kobayashi and S. Jurecka and M. Jergel and H. Gleskova and M. Takahashi and R. Brunner and N. Fujiwara and J. Mullerova",

year = "2004",

language = "English",

isbn = "9780819457554",

volume = "5774",

pages = "481--488",

editor = "J. Chu and Z. Lai and L. Wang and S. Xu",

booktitle = "Proccedings of the fifth international conference on thin film physics and applications",

note = "Fifth International Conference on Thin Film Physics and Applications ; Conference date: 31-05-2004 Through 02-06-2004",

}

Pincik, E, Kobayashi, H, Jurecka, S, Jergel , M, Gleskova, H, Takahashi, M, Brunner, R, Fujiwara, N & Mullerova, J 2004, Investigation of electrical, structural, and optical properties of very thin oxide/a-Si:H/c-Si interfaces passivated by cyanide treatment. in J Chu, Z Lai, L Wang & S Xu (eds), Proccedings of the fifth international conference on thin film physics and applications. vol. 5774, Bellingham, WA , pp. 481-488, Fifth International Conference on Thin Film Physics and Applications, Shanghai, China, 31/05/04.

Investigation of electrical, structural, and optical properties of very thin oxide/a-Si:H/c-Si interfaces passivated by cyanide treatment. / Pincik, E. ; Kobayashi, H.; Jurecka, S. et al.

Proccedings of the fifth international conference on thin film physics and applications. ed. / J. Chu; Z. Lai; L. Wang; S. Xu. Vol. 5774 Bellingham, WA , 2004. p. 481-488.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

TY - GEN

T1 - Investigation of electrical, structural, and optical properties of very thin oxide/a-Si:H/c-Si interfaces passivated by cyanide treatment

AU - Pincik, E.

AU - Kobayashi, H.

AU - Jurecka, S.

AU - Jergel , M.

AU - Gleskova, H.

AU - Takahashi, M.

AU - Brunner, R.

AU - Fujiwara, N.

AU - Mullerova, J.

PY - 2004

Y1 - 2004

N2 - This chapter looks at the investigation of electrical, structural, and optical properties of very thin oxide/a-Si:H/c-Si interfaces passivated by cyanide treatment

AB - This chapter looks at the investigation of electrical, structural, and optical properties of very thin oxide/a-Si:H/c-Si interfaces passivated by cyanide treatment

KW - investigation

KW - electrical

KW - structural

KW - optical properties

KW - very thin oxide

KW - cyanide treatment

M3 - Conference contribution book

SN - 9780819457554

VL - 5774

SP - 481

EP - 488

BT - Proccedings of the fifth international conference on thin film physics and applications

A2 - Chu, J.

A2 - Lai, Z.

A2 - Wang, L.

A2 - Xu, S.

CY - Bellingham, WA

T2 - Fifth International Conference on Thin Film Physics and Applications

Y2 - 31 May 2004 through 2 June 2004

ER -

Pincik E, Kobayashi H, Jurecka S, Jergel M, Gleskova H, Takahashi M et al. Investigation of electrical, structural, and optical properties of very thin oxide/a-Si:H/c-Si interfaces passivated by cyanide treatment. In Chu J, Lai Z, Wang L, Xu S, editors, Proccedings of the fifth international conference on thin film physics and applications. Vol. 5774. Bellingham, WA . 2004. p. 481-488

Investigation of electrical, structural, and optical properties of very thin oxide/a-Si:H/c-Si interfaces passivated by cyanide treatment

Abstract

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Keywords

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