Abstract
A technique based on the Fresnel diffraction effect for the fabrication of nano-scale site-controlled ring structures in InGaN/GaN multi-quantum well structures has been demonstrated. The ring structures have an internal diameter of 500 nm and a wall width of 300 nm. A 1 cm-1 Raman shift has been measured, signifying substantial strain relaxation from the fabricated structure. The 9 nm blueshift observed in the cathodoluminescence spectra can be attributed to band filling and/or screening of the piezoelectric field. A light emitting diode based on this geometry has been demonstrated.
Original language | English |
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Article number | 021101 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 86 |
Issue number | 2 |
DOIs | |
Publication status | Published - 30 Dec 2004 |
Keywords
- indium compounds
- gallium compounds
- nanostructured materials
- nanolithography
- optical fabrication
- light emitting diodes
- photonics