Influence of microphone housing on the directional response of piezoelectric MEMS microphones inspired by Ormia ochracea

Ralf Bauer, Yansheng Zhang, Joseph C. Jackson, William M. Whitmer, W. Owen Brimijoin, Michael A. Akeroyd, Deepak Uttamchandani, James F. C. Windmill

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

The influence of custom microphone housings on the acoustic directionality and frequency response of a multi - band bio - inspired MEMS microphone is presented. The 3.2mm by 1.7mm piezoelectric MEMS microphone, fabricated by a cost - effective multi - user process, has four frequency bands of operation below 10 kHz, with a desired first order directionality for all four bands. 7x 7x2.5 mm 3 3D - printed bespoke housings with varying acoustic access to the backside of the microphone membrane are investigated through simulation and experiment with respect to their influence on the directionality and frequency response to sound stimulus. Results show a clear link between directionality and acoustic access to the back cavity of the microphone. Further, there was a change in direction of the first order directionality with reduced height in this back cavity acoustic access. The required con figuration for creating an identical directionality for all four frequency bands is investigated along with the influence of reducing the symmetry of the acoustic back cavity access. This work highlights the overall requirement of considering housing geome tries and their influence on acoustic behavior for bio - inspired directional microphones
LanguageEnglish
Pages5529-5536
Number of pages8
JournalIEEE Sensors Journal
Volume17
Issue number17
Early online date20 Jul 2017
DOIs
Publication statusPublished - 1 Sep 2017

Fingerprint

Microphones
microphones
microelectromechanical systems
MEMS
Acoustics
acoustics
Frequency bands
Frequency response
frequency response
cavities
stimuli
Acoustic waves
Membranes
membranes
costs
requirements
symmetry
Costs
Experiments
simulation

Keywords

  • 3D printing
  • acoustic response
  • bio-inspired directional microphones
  • MEMS
  • microphone housings

Cite this

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abstract = "The influence of custom microphone housings on the acoustic directionality and frequency response of a multi - band bio - inspired MEMS microphone is presented. The 3.2mm by 1.7mm piezoelectric MEMS microphone, fabricated by a cost - effective multi - user process, has four frequency bands of operation below 10 kHz, with a desired first order directionality for all four bands. 7x 7x2.5 mm 3 3D - printed bespoke housings with varying acoustic access to the backside of the microphone membrane are investigated through simulation and experiment with respect to their influence on the directionality and frequency response to sound stimulus. Results show a clear link between directionality and acoustic access to the back cavity of the microphone. Further, there was a change in direction of the first order directionality with reduced height in this back cavity acoustic access. The required con figuration for creating an identical directionality for all four frequency bands is investigated along with the influence of reducing the symmetry of the acoustic back cavity access. This work highlights the overall requirement of considering housing geome tries and their influence on acoustic behavior for bio - inspired directional microphones",
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Influence of microphone housing on the directional response of piezoelectric MEMS microphones inspired by Ormia ochracea. / Bauer, Ralf; Zhang, Yansheng; Jackson, Joseph C.; Whitmer, William M.; Brimijoin, W. Owen; Akeroyd, Michael A.; Uttamchandani, Deepak; Windmill, James F. C.

In: IEEE Sensors Journal, Vol. 17, No. 17, 01.09.2017, p. 5529-5536.

Research output: Contribution to journalArticle

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