| Original language | English |
|---|---|
| Priority date | 22/03/07 |
| Publication status | Published - 31 Jul 2008 |
Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver
Inductively-Coupled Plasma (ICP) etching on Diamond
Martin Dawson (Inventor), Erdan Gu (Inventor), Chee-Leong Lee (Inventor)
Research output: Patent