Increasing MEMS micromirror line-scan rates through 3D-printed micro-optics

Jay Christopher; Mark Donnachie; Deepak Uttamchandani; Ralf Bauer

doi:10.1109/OMN/SBFotonIOPC58971.2023.10230934

Increasing MEMS micromirror line-scan rates through 3D-printed micro-optics

Jay Christopher, Mark Donnachie, Deepak Uttamchandani, Ralf Bauer

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

87 Downloads (Pure)

Abstract

Line-scan rates of mechanical scanners are in general limited to <100 kHz for scan mirror apertures of up to 1 mm. We present work to increase the line-scan rate of a MEMS micromirror beyond this through a scan multiplication unit consisting of a mirror, a cylindrical lens, and a 3D-printed cylindrical microlens array with 1 mm pitch and 2.5 mm effective focal length. Scan rates of up to 635 kHz at the scan line centre are demonstrated with seven array lenslets, with the compact multiplier having the potential to achieve over 1 MHz line-scan rate using higher element numbers.

Original language	English
Title of host publication	2023 International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC)
Place of Publication	Piscataway, NJ
Publisher	IEEE
Number of pages	2
ISBN (Electronic)	9798350304022
ISBN (Print)	9798350304039
DOIs	https://doi.org/10.1109/OMN/SBFotonIOPC58971.2023.10230934
Publication status	Published - 1 Sept 2023
Event	International Conference on Optical MEMS and Nanophotonics (OMN) 2023 - Unicamp, Campinas, Brazil Duration: 30 Jul 2023 → 3 Aug 2023 https://conference2023.sbfoton.org.br/

Publication series

Name	International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC)
Publisher	IEEE
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Conference

Conference	International Conference on Optical MEMS and Nanophotonics (OMN) 2023
Country/Territory	Brazil
City	Campinas
Period	30/07/23 → 3/08/23
Internet address	https://conference2023.sbfoton.org.br/

Keywords

MEMS scanner
3D-printed optics
scan multiplier unit
fast line scan

Access to Document

10.1109/OMN/SBFotonIOPC58971.2023.10230934

Christopehr-etal-OMN-2023-Increasing-MEMS-micromirror-line-scan-ratesAccepted author manuscript, 1 MBLicence: Strath_1

Doctoral Training Partnership 2020-2021 University of Strathclyde | Christopher, Jay
Bauer, R. (Principal Investigator), Murray, P. (Co-investigator) & Christopher, J. (Research Co-investigator)
EPSRC (Engineering and Physical Sciences Research Council)
1/10/20 → 28/01/25
Project: Research Studentship - Internally Allocated
MEMS-enabled miniaturised multimodal microscopy through pulsed structured illumination
Bauer, R. (Principal Investigator)
EPSRC (Engineering and Physical Sciences Research Council)
6/01/20 → 15/10/22
Project: Research
Doctoral Training Partnership 2018-19 University of Strathclyde | Donnachie, Mark
Bauer, R. (Principal Investigator), Uttamchandani, D. (Co-investigator) & Donnachie, M. (Research Co-investigator)
EPSRC (Engineering and Physical Sciences Research Council)
1/10/18 → 1/07/22
Project: Research Studentship - Internally Allocated

Data for: "Increasing MEMS micromirror line-scan rates through 3D-printed micro-optics"
Bauer, R. (Supervisor), Christopher, J. (Creator), Donnachie, M. (Contributor) & Uttamchandani, D. (Supervisor), University of Strathclyde, 6 Jun 2023
DOI: 10.15129/2cdf7add-aaea-4639-b092-876ea3245b38
Dataset

Cite this

Christopher, J., Donnachie, M., Uttamchandani, D., & Bauer, R. (2023). Increasing MEMS micromirror line-scan rates through 3D-printed micro-optics. In 2023 International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC) (International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC)). IEEE. https://doi.org/10.1109/OMN/SBFotonIOPC58971.2023.10230934

Christopher, Jay ; Donnachie, Mark ; Uttamchandani, Deepak et al. / Increasing MEMS micromirror line-scan rates through 3D-printed micro-optics. 2023 International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC). Piscataway, NJ : IEEE, 2023. (International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC)).

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title = "Increasing MEMS micromirror line-scan rates through 3D-printed micro-optics",

abstract = "Line-scan rates of mechanical scanners are in general limited to <100 kHz for scan mirror apertures of up to 1 mm. We present work to increase the line-scan rate of a MEMS micromirror beyond this through a scan multiplication unit consisting of a mirror, a cylindrical lens, and a 3D-printed cylindrical microlens array with 1 mm pitch and 2.5 mm effective focal length. Scan rates of up to 635 kHz at the scan line centre are demonstrated with seven array lenslets, with the compact multiplier having the potential to achieve over 1 MHz line-scan rate using higher element numbers.",

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Christopher, J , Donnachie, M , Uttamchandani, D & Bauer, R 2023, Increasing MEMS micromirror line-scan rates through 3D-printed micro-optics. in 2023 International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC). International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC), IEEE, Piscataway, NJ, International Conference on Optical MEMS and Nanophotonics (OMN) 2023, Campinas, Brazil, 30/07/23. https://doi.org/10.1109/OMN/SBFotonIOPC58971.2023.10230934

Increasing MEMS micromirror line-scan rates through 3D-printed micro-optics. / Christopher, Jay ; Donnachie, Mark ; Uttamchandani, Deepak et al.
2023 International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC). Piscataway, NJ: IEEE, 2023. (International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

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AU - Christopher, Jay

AU - Donnachie, Mark

AU - Uttamchandani, Deepak

AU - Bauer, Ralf

N1 - © 2023 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2023/9/1

Y1 - 2023/9/1

N2 - Line-scan rates of mechanical scanners are in general limited to <100 kHz for scan mirror apertures of up to 1 mm. We present work to increase the line-scan rate of a MEMS micromirror beyond this through a scan multiplication unit consisting of a mirror, a cylindrical lens, and a 3D-printed cylindrical microlens array with 1 mm pitch and 2.5 mm effective focal length. Scan rates of up to 635 kHz at the scan line centre are demonstrated with seven array lenslets, with the compact multiplier having the potential to achieve over 1 MHz line-scan rate using higher element numbers.

AB - Line-scan rates of mechanical scanners are in general limited to <100 kHz for scan mirror apertures of up to 1 mm. We present work to increase the line-scan rate of a MEMS micromirror beyond this through a scan multiplication unit consisting of a mirror, a cylindrical lens, and a 3D-printed cylindrical microlens array with 1 mm pitch and 2.5 mm effective focal length. Scan rates of up to 635 kHz at the scan line centre are demonstrated with seven array lenslets, with the compact multiplier having the potential to achieve over 1 MHz line-scan rate using higher element numbers.

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KW - 3D-printed optics

KW - scan multiplier unit

KW - fast line scan

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DO - 10.1109/OMN/SBFotonIOPC58971.2023.10230934

M3 - Conference contribution book

SN - 9798350304039

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BT - 2023 International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC)

PB - IEEE

CY - Piscataway, NJ

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ER -

Christopher J , Donnachie M , Uttamchandani D , Bauer R. Increasing MEMS micromirror line-scan rates through 3D-printed micro-optics. In 2023 International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC). Piscataway, NJ: IEEE. 2023. (International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC)). doi: 10.1109/OMN/SBFotonIOPC58971.2023.10230934

Increasing MEMS micromirror line-scan rates through 3D-printed micro-optics

Abstract

Publication series

Conference

Keywords

Access to Document

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Projects

Doctoral Training Partnership 2020-2021 University of Strathclyde | Christopher, Jay

MEMS-enabled miniaturised multimodal microscopy through pulsed structured illumination

Doctoral Training Partnership 2018-19 University of Strathclyde | Donnachie, Mark

Datasets

Data for: "Increasing MEMS micromirror line-scan rates through 3D-printed micro-optics"

Cite this