Increasing MEMS micromirror line-scan rates through 3D-printed micro-optics

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

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Abstract

Line-scan rates of mechanical scanners are in general limited to <100 kHz for scan mirror apertures of up to 1 mm. We present work to increase the line-scan rate of a MEMS micromirror beyond this through a scan multiplication unit consisting of a mirror, a cylindrical lens, and a 3D-printed cylindrical microlens array with 1 mm pitch and 2.5 mm effective focal length. Scan rates of up to 635 kHz at the scan line centre are demonstrated with seven array lenslets, with the compact multiplier having the potential to achieve over 1 MHz line-scan rate using higher element numbers.
Original languageEnglish
Title of host publication2023 International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC)
Place of PublicationPiscataway, NJ
PublisherIEEE
Number of pages2
ISBN (Electronic)9798350304022
ISBN (Print)9798350304039
DOIs
Publication statusPublished - 1 Sept 2023
EventInternational Conference on Optical MEMS and Nanophotonics (OMN) 2023 - Unicamp, Campinas, Brazil
Duration: 30 Jul 20233 Aug 2023
https://conference2023.sbfoton.org.br/

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC)
PublisherIEEE
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

ConferenceInternational Conference on Optical MEMS and Nanophotonics (OMN) 2023
Country/TerritoryBrazil
CityCampinas
Period30/07/233/08/23
Internet address

Keywords

  • MEMS scanner
  • 3D-printed optics
  • scan multiplier unit
  • fast line scan

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