In-situ reflectometry studies of GaN growth initiation, inGaN structure growth, and ELOG

I.M. Watson; M.D. Dawson; C.J. Deatcher; H.S. Kim; K.S. Kim; C. Liu

In-situ reflectometry studies of GaN growth initiation, inGaN structure growth, and ELOG

I.M. Watson, M.D. Dawson, C.J. Deatcher, H.S. Kim, K.S. Kim, C. Liu

Research output: Contribution to conference › Paper

Abstract

This paper covers in-situ reflectometry studies of GaN growth initiation, inGaN structure growth, and ELOG. It was presented at the 2001 European workshop on metalorganic vapour phase epitaxy.

Original language	English
Publication status	Unpublished - 13 Jun 2001
Event	European workshop on metalorganic vapour phase epitaxy - Wrexham, United Kingdom Duration: 10 Jun 2001 → 13 Jun 2001

Conference

Conference	European workshop on metalorganic vapour phase epitaxy
City	Wrexham, United Kingdom
Period	10/06/01 → 13/06/01

Keywords

reflectometry
GaN
growth initiation
inGaN
structure growth
ELOG

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@conference{c1f8cd73d09b493ca134674cc101356a,

title = "In-situ reflectometry studies of GaN growth initiation, inGaN structure growth, and ELOG",

abstract = "This paper covers in-situ reflectometry studies of GaN growth initiation, inGaN structure growth, and ELOG. It was presented at the 2001 European workshop on metalorganic vapour phase epitaxy.",

keywords = "reflectometry, GaN, growth initiation, inGaN, structure growth, ELOG",

author = "I.M. Watson and M.D. Dawson and C.J. Deatcher and H.S. Kim and K.S. Kim and C. Liu",

year = "2001",

month = jun,

day = "13",

language = "English",

note = "European workshop on metalorganic vapour phase epitaxy ; Conference date: 10-06-2001 Through 13-06-2001",

}

TY - CONF

T1 - In-situ reflectometry studies of GaN growth initiation, inGaN structure growth, and ELOG

AU - Watson, I.M.

AU - Dawson, M.D.

AU - Deatcher, C.J.

AU - Kim, H.S.

AU - Kim, K.S.

AU - Liu, C.

PY - 2001/6/13

Y1 - 2001/6/13

N2 - This paper covers in-situ reflectometry studies of GaN growth initiation, inGaN structure growth, and ELOG. It was presented at the 2001 European workshop on metalorganic vapour phase epitaxy.

AB - This paper covers in-situ reflectometry studies of GaN growth initiation, inGaN structure growth, and ELOG. It was presented at the 2001 European workshop on metalorganic vapour phase epitaxy.

KW - reflectometry

KW - GaN

KW - growth initiation

KW - inGaN

KW - structure growth

KW - ELOG

M3 - Paper

T2 - European workshop on metalorganic vapour phase epitaxy

Y2 - 10 June 2001 through 13 June 2001

ER -

In-situ reflectometry studies of GaN growth initiation, inGaN structure growth, and ELOG

Abstract

Conference

Keywords

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Cite this