In-situ reflectometry based studies of lateral epitaxial overgrowth

I.M. Watson; K.S. Kim; H.S. Kim; C. Liu; C.J. Deatcher; J.M. Girkin; M.D. Dawson; P.R. Edwards; C. Trager-Cowan; R.W. Martin

In-situ reflectometry based studies of lateral epitaxial overgrowth

I.M. Watson, K.S. Kim, H.S. Kim, C. Liu, C.J. Deatcher, J.M. Girkin, M.D. Dawson, P.R. Edwards, C. Trager-Cowan, R.W. Martin

Research output: Contribution to conference › Paper

Abstract

This paper covers in-situ reflectometry based studies of lateral epitaxial overgrowth. It was presented at the 2001 UK Nitrides consortium.

Original language	English
Publication status	Unpublished - Sept 2001
Event	UK Nitrides Consortium Meeting - Glasgow, United Kingdom Duration: 1 Sept 2001 → …

Conference

Conference	UK Nitrides Consortium Meeting
City	Glasgow, United Kingdom
Period	1/09/01 → …

Keywords

in-situ reflectometry
reflectometry
lateral epitaxial overgrowth

Cite this

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title = "In-situ reflectometry based studies of lateral epitaxial overgrowth",

abstract = "This paper covers in-situ reflectometry based studies of lateral epitaxial overgrowth. It was presented at the 2001 UK Nitrides consortium.",

keywords = "in-situ reflectometry, reflectometry, lateral epitaxial overgrowth",

author = "I.M. Watson and K.S. Kim and H.S. Kim and C. Liu and C.J. Deatcher and J.M. Girkin and M.D. Dawson and P.R. Edwards and C. Trager-Cowan and R.W. Martin",

note = "AHR; UK Nitrides Consortium Meeting ; Conference date: 01-09-2001",

year = "2001",

month = sep,

language = "English",

}

TY - CONF

T1 - In-situ reflectometry based studies of lateral epitaxial overgrowth

AU - Watson, I.M.

AU - Kim, K.S.

AU - Kim, H.S.

AU - Liu, C.

AU - Deatcher, C.J.

AU - Girkin, J.M.

AU - Dawson, M.D.

AU - Edwards, P.R.

AU - Trager-Cowan, C.

AU - Martin, R.W.

N1 - AHR

PY - 2001/9

Y1 - 2001/9

N2 - This paper covers in-situ reflectometry based studies of lateral epitaxial overgrowth. It was presented at the 2001 UK Nitrides consortium.

AB - This paper covers in-situ reflectometry based studies of lateral epitaxial overgrowth. It was presented at the 2001 UK Nitrides consortium.

KW - in-situ reflectometry

KW - reflectometry

KW - lateral epitaxial overgrowth

M3 - Paper

T2 - UK Nitrides Consortium Meeting

Y2 - 1 September 2001

ER -

In-situ reflectometry based studies of lateral epitaxial overgrowth

Abstract

Conference

Keywords

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