In situ measurement of spindle radial and tilt error motions by complementary multi-probe method

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Abstract

This paper presents a complementary multi-probe method for measurement of radial and tilt error motions of a spindle. Neither indexing of artefact nor rotating of spindle housing is required and thus make it suitable for in-situ evaluation of spindle performance effectively. In order to minimise the harmonic suppression problems commonly encountered in the multi-probe measurement approach, three sets of probe angle combinations are selected and the smallest harmonics of the three measurements are extracted to compose the true artefact errors in the harmonic domain. The exact probe angles are identified by probe signals after the sensors are mounted onto the fixture and this alleviate the requirement of high precision fixtures. The evaluation of measurement results shows that this method is effective and the erroneous harmonics are greatly reduced. Using this method, the radial error motions of the precision air bearing spindle are measured at seven axial positions and then the synchronised tilts error motions are calculated. This demonstrated an effective approach for measuring 4 degree of freedom error motions in one setup with three displacement sensor probes.
Original languageEnglish
Number of pages10
JournalNanomanufacturing and Metrology
Early online date11 Nov 2019
DOIs
Publication statusE-pub ahead of print - 11 Nov 2019

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Keywords

  • spindle error
  • multi-probe
  • ultra-precision spindle
  • harmonic suppression

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