Improving the yield and lifetime of microfabricated sensors for harsh environments

Ewen Blair; D.K. Corrigan; H.J. Levene; I. Schmueser; J. G. Terry; S. Smith; A. R. Mount; A. J. Walton

doi:10.1109/TSM.2017.2715377

Improving the yield and lifetime of microfabricated sensors for harsh environments

Ewen Blair, D.K. Corrigan, H.J. Levene, I. Schmueser, J. G. Terry, S. Smith, A. R. Mount, A. J. Walton

Biomedical Engineering

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Abstract

This paper details improvements in the design and fabrication of electrodes intended to function in the high temperature, corrosive environment of a molten salt. Previously reported devices have displayed low yield and lifetimes and this paper presents two strategies to improve these aspects of their performance. The first one involves reducing the critical area, which increased both the electrode yield and lifetimes. The second element utilised test structures, targeted at identifying failure mechanisms, which helped facilitate the materials/design modifications required to make the devices more robust.

Original language	English
Pages (from-to)	192-200
Number of pages	9
Journal	IEEE Transactions on Semiconductor Manufacturing
Volume	30
Issue number	3
Early online date	14 Jun 2017
DOIs	https://doi.org/10.1109/TSM.2017.2715377
Publication status	Published - 31 Aug 2017

Keywords

test structures
microelectrodes
molten salt
LKE
yield
lifetime
microfabrication

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10.1109/TSM.2017.2715377

Blair-etal-IEEETSM-2017-Improving-the-yield-and-lifetime-of-microfabricated-sensors-for-harsh-environmentsAccepted author manuscript, 1.44 MB

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AU - Mount, A. R.

AU - Walton, A. J.

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Improving the yield and lifetime of microfabricated sensors for harsh environments

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Keywords

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