Improving the yield and lifetime of microfabricated sensors for harsh environments

Ewen Blair, D.K. Corrigan, H.J. Levene, I. Schmueser, J. G. Terry, S. Smith, A. R. Mount, A. J. Walton

Research output: Contribution to journalArticle

2 Citations (Scopus)
25 Downloads (Pure)

Abstract

This paper details improvements in the design and fabrication of electrodes intended to function in the high temperature, corrosive environment of a molten salt. Previously reported devices have displayed low yield and lifetimes and this paper presents two strategies to improve these aspects of their performance. The first one involves reducing the critical area, which increased both the electrode yield and lifetimes. The second element utilised test structures, targeted at identifying failure mechanisms, which helped facilitate the materials/design modifications required to make the devices more robust.
Original languageEnglish
Pages (from-to)192-200
Number of pages9
JournalIEEE Transactions on Semiconductor Manufacturing
Volume30
Issue number3
Early online date14 Jun 2017
DOIs
Publication statusPublished - 31 Aug 2017

Keywords

  • test structures
  • microelectrodes
  • molten salt
  • LKE
  • yield
  • lifetime
  • microfabrication

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