Impact of laser scribing for efficient device separation of LED components

E.K. Illy; M.R.H. Knowles; E. Gu; M.D. Dawson

doi:10.1016/j.apsusc.2004.12.033

Impact of laser scribing for efficient device separation of LED components

E.K. Illy, M.R.H. Knowles, E. Gu, M.D. Dawson

Research output: Contribution to journal › Article › peer-review

25 Citations (Scopus)

Abstract

Laser scribing of light emitting diode (LED) components on sapphire substrates is shown in this paper to be a viable method of device separation. Three key measurements revealing the effects of UV laser scribing on the LED component performance are discussed and compared for laser scribing at 255 and 355 nm. The differences in these two UV wavelengths are further discussed in terms of quality; comparing pulse energies and pulse repetition frequencies for UV ablation of sapphire. In general, these results prove laser processing can be used as an effective high volume manufacturing procedure for substrate separation.

Original language	English
Pages (from-to)	354-361
Number of pages	7
Journal	Applied Surface Science
Volume	249
Issue number	1-4
DOIs	https://doi.org/10.1016/j.apsusc.2004.12.033
Publication status	Published - 2005

Keywords

laser scribing
sapphire scribing
laser dicing
UV wavelengths
LEDs
photonics

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10.1016/j.apsusc.2004.12.033

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title = "Impact of laser scribing for efficient device separation of LED components",

abstract = "Laser scribing of light emitting diode (LED) components on sapphire substrates is shown in this paper to be a viable method of device separation. Three key measurements revealing the effects of UV laser scribing on the LED component performance are discussed and compared for laser scribing at 255 and 355 nm. The differences in these two UV wavelengths are further discussed in terms of quality; comparing pulse energies and pulse repetition frequencies for UV ablation of sapphire. In general, these results prove laser processing can be used as an effective high volume manufacturing procedure for substrate separation.",

keywords = "laser scribing, sapphire scribing, laser dicing, UV wavelengths, LEDs, photonics",

author = "E.K. Illy and M.R.H. Knowles and E. Gu and M.D. Dawson",

year = "2005",

doi = "10.1016/j.apsusc.2004.12.033",

language = "English",

volume = "249",

pages = "354--361",

journal = "Applied Surface Science",

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T1 - Impact of laser scribing for efficient device separation of LED components

AU - Illy, E.K.

AU - Knowles, M.R.H.

AU - Gu, E.

AU - Dawson, M.D.

PY - 2005

Y1 - 2005

N2 - Laser scribing of light emitting diode (LED) components on sapphire substrates is shown in this paper to be a viable method of device separation. Three key measurements revealing the effects of UV laser scribing on the LED component performance are discussed and compared for laser scribing at 255 and 355 nm. The differences in these two UV wavelengths are further discussed in terms of quality; comparing pulse energies and pulse repetition frequencies for UV ablation of sapphire. In general, these results prove laser processing can be used as an effective high volume manufacturing procedure for substrate separation.

AB - Laser scribing of light emitting diode (LED) components on sapphire substrates is shown in this paper to be a viable method of device separation. Three key measurements revealing the effects of UV laser scribing on the LED component performance are discussed and compared for laser scribing at 255 and 355 nm. The differences in these two UV wavelengths are further discussed in terms of quality; comparing pulse energies and pulse repetition frequencies for UV ablation of sapphire. In general, these results prove laser processing can be used as an effective high volume manufacturing procedure for substrate separation.

KW - laser scribing

KW - sapphire scribing

KW - laser dicing

KW - UV wavelengths

KW - LEDs

KW - photonics

UR - http://dx.doi.org/10.1016/j.apsusc.2004.12.033

U2 - 10.1016/j.apsusc.2004.12.033

DO - 10.1016/j.apsusc.2004.12.033

M3 - Article

SN - 0169-4332

VL - 249

SP - 354

EP - 361

JO - Applied Surface Science

JF - Applied Surface Science

IS - 1-4

ER -

Impact of laser scribing for efficient device separation of LED components

Abstract

Keywords

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