Abstract
Dynamic behavior hysteresis of framed and frameless comb-drive actuated 2D MEMS scanning micromirrors is experimentally compared, with a framed micromirror showing reduction or even elimination of the hysteretic frequency response along one of its principal motion axes.
| Original language | English |
|---|---|
| Title of host publication | OMN2011 |
| Subtitle of host publication | 16th International conference on optical mems and nanophotonics |
| Place of Publication | New York |
| Publisher | IEEE |
| Pages | 187-188 |
| Number of pages | 2 |
| ISBN (Print) | 9781457703362 |
| DOIs | |
| Publication status | Published - 2011 |
| Event | 16th International Conference on Optical MEMS and Nanophotonics (OMN) - Istanbul, Turkey Duration: 8 Aug 2011 → 11 Aug 2011 |
Conference
| Conference | 16th International Conference on Optical MEMS and Nanophotonics (OMN) |
|---|---|
| Country/Territory | Turkey |
| City | Istanbul |
| Period | 8/08/11 → 11/08/11 |
Keywords
- frame
- hysteresis
- mems micromirror
- resonant 2D scanning
- framed
- frameless
- electrostatic X/Y scanning