Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

Abstract

Dynamic behavior hysteresis of framed and frameless comb-drive actuated 2D MEMS scanning micromirrors is experimentally compared, with a framed micromirror showing reduction or even elimination of the hysteretic frequency response along one of its principal motion axes.
Original languageEnglish
Title of host publicationOMN2011
Subtitle of host publication16th International conference on optical mems and nanophotonics
Place of PublicationNew York
PublisherIEEE
Pages187-188
Number of pages2
ISBN (Print)9781457703362
DOIs
Publication statusPublished - 2011
Event16th International Conference on Optical MEMS and Nanophotonics (OMN) - Istanbul, Turkey
Duration: 8 Aug 201111 Aug 2011

Conference

Conference16th International Conference on Optical MEMS and Nanophotonics (OMN)
CountryTurkey
CityIstanbul
Period8/08/1111/08/11

Keywords

  • frame
  • hysteresis
  • mems micromirror
  • resonant 2D scanning
  • framed
  • frameless
  • electrostatic X/Y scanning

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