Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

Abstract

Dynamic behavior hysteresis of framed and frameless comb-drive actuated 2D MEMS scanning micromirrors is experimentally compared, with a framed micromirror showing reduction or even elimination of the hysteretic frequency response along one of its principal motion axes.
LanguageEnglish
Title of host publicationOMN2011
Subtitle of host publication16th International conference on optical mems and nanophotonics
Place of PublicationNew York
PublisherIEEE
Pages187-188
Number of pages2
ISBN (Print)9781457703362
DOIs
Publication statusPublished - 2011
Event16th International Conference on Optical MEMS and Nanophotonics (OMN) - Istanbul, Turkey
Duration: 8 Aug 201111 Aug 2011

Conference

Conference16th International Conference on Optical MEMS and Nanophotonics (OMN)
CountryTurkey
CityIstanbul
Period8/08/1111/08/11

Fingerprint

Frequency response
MEMS
Hysteresis
Electrostatics
Scanning

Keywords

  • frame
  • hysteresis
  • mems micromirror
  • resonant 2D scanning
  • framed
  • frameless
  • electrostatic X/Y scanning

Cite this

Bauer, R., Brown, G., & Uttamchandani, D. (2011). Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors. In OMN2011: 16th International conference on optical mems and nanophotonics (pp. 187-188). New York: IEEE. https://doi.org/10.1109/OMEMS.2011.6031056
Bauer, R. ; Brown, G. ; Uttamchandani, D. / Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors. OMN2011: 16th International conference on optical mems and nanophotonics. New York : IEEE, 2011. pp. 187-188
@inproceedings{ac76a84a498a45b0a9214f0ab6b50c94,
title = "Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors",
abstract = "Dynamic behavior hysteresis of framed and frameless comb-drive actuated 2D MEMS scanning micromirrors is experimentally compared, with a framed micromirror showing reduction or even elimination of the hysteretic frequency response along one of its principal motion axes.",
keywords = "frame, hysteresis, mems micromirror, resonant 2D scanning, framed, frameless, electrostatic X/Y scanning",
author = "R. Bauer and G. Brown and D. Uttamchandani",
year = "2011",
doi = "10.1109/OMEMS.2011.6031056",
language = "English",
isbn = "9781457703362",
pages = "187--188",
booktitle = "OMN2011",
publisher = "IEEE",

}

Bauer, R, Brown, G & Uttamchandani, D 2011, Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors. in OMN2011: 16th International conference on optical mems and nanophotonics. IEEE, New York, pp. 187-188, 16th International Conference on Optical MEMS and Nanophotonics (OMN), Istanbul, Turkey, 8/08/11. https://doi.org/10.1109/OMEMS.2011.6031056

Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors. / Bauer, R.; Brown, G.; Uttamchandani, D.

OMN2011: 16th International conference on optical mems and nanophotonics. New York : IEEE, 2011. p. 187-188.

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

TY - GEN

T1 - Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors

AU - Bauer, R.

AU - Brown, G.

AU - Uttamchandani, D.

PY - 2011

Y1 - 2011

N2 - Dynamic behavior hysteresis of framed and frameless comb-drive actuated 2D MEMS scanning micromirrors is experimentally compared, with a framed micromirror showing reduction or even elimination of the hysteretic frequency response along one of its principal motion axes.

AB - Dynamic behavior hysteresis of framed and frameless comb-drive actuated 2D MEMS scanning micromirrors is experimentally compared, with a framed micromirror showing reduction or even elimination of the hysteretic frequency response along one of its principal motion axes.

KW - frame

KW - hysteresis

KW - mems micromirror

KW - resonant 2D scanning

KW - framed

KW - frameless

KW - electrostatic X/Y scanning

U2 - 10.1109/OMEMS.2011.6031056

DO - 10.1109/OMEMS.2011.6031056

M3 - Conference contribution book

SN - 9781457703362

SP - 187

EP - 188

BT - OMN2011

PB - IEEE

CY - New York

ER -

Bauer R, Brown G, Uttamchandani D. Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors. In OMN2011: 16th International conference on optical mems and nanophotonics. New York: IEEE. 2011. p. 187-188 https://doi.org/10.1109/OMEMS.2011.6031056