Hyperspectral alignment capability for direct writing systems enabled by structured illumination with a micro-LED array

A Blanchard; P R Edwards; B Guilhabert; E Gu; I M Watson; J Herrnsdorf

doi:10.1088/2040-8986/adcfb0

Hyperspectral alignment capability for direct writing systems enabled by structured illumination with a micro-LED array

A Blanchard^*, P R Edwards, B Guilhabert, E Gu, I M Watson, J Herrnsdorf

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

5 Downloads (Pure)

Abstract

Direct writing systems equipped with a confocal micro-light-emitting diode array can employ active illumination for alignment purposes. Based on the principles of single-pixel imaging, structured illumination can be used to obtain position information via compressive sensing. The positions of markers with certain spectral signatures can be extracted from the recorded hyperspectral data through spectral filtering, spectral fitting, or principal component analysis. Its application to direct writing is demonstrated by creating individual photolithography patterns aligned with different types of fluorophores on the same substrate.

Original language	English
Article number	055402
Number of pages	10
Journal	Journal of Optics
Volume	27
Issue number	5
Early online date	23 Apr 2025
DOIs	https://doi.org/10.1088/2040-8986/adcfb0
Publication status	Published - 7 May 2025

Funding

The authors thank the EPSRC, Platform Grant number EP/P02744X/2 for their funding and support for this work.

Keywords

structured illumination
micro-LED arrays
hyperspectral imaging
automated alignment

Access to Document

10.1088/2040-8986/adcfb0Licence: CC BY 4.0

Blanchard-etal-JO-2025-Hyperspectral-alignment-capability-for-direct-writing-systemsFinal published version, 1.31 MBLicence: CC BY 4.0

Cite this

@article{ee9ecf44f5f64b019eb5d26aa2cc91f4,

title = "Hyperspectral alignment capability for direct writing systems enabled by structured illumination with a micro-LED array",

abstract = "Direct writing systems equipped with a confocal micro-light-emitting diode array can employ active illumination for alignment purposes. Based on the principles of single-pixel imaging, structured illumination can be used to obtain position information via compressive sensing. The positions of markers with certain spectral signatures can be extracted from the recorded hyperspectral data through spectral filtering, spectral fitting, or principal component analysis. Its application to direct writing is demonstrated by creating individual photolithography patterns aligned with different types of fluorophores on the same substrate.",

keywords = "structured illumination, micro-LED arrays, hyperspectral imaging, automated alignment",

author = "A Blanchard and Edwards, \{P R\} and B Guilhabert and E Gu and Watson, \{I M\} and J Herrnsdorf",

year = "2025",

month = may,

day = "7",

doi = "10.1088/2040-8986/adcfb0",

language = "English",

volume = "27",

journal = "Journal of Optics",

issn = "0972-8821",

publisher = "Springer",

number = "5",

}

TY - JOUR

T1 - Hyperspectral alignment capability for direct writing systems enabled by structured illumination with a micro-LED array

AU - Blanchard, A

AU - Edwards, P R

AU - Guilhabert, B

AU - Gu, E

AU - Watson, I M

AU - Herrnsdorf, J

PY - 2025/5/7

Y1 - 2025/5/7

N2 - Direct writing systems equipped with a confocal micro-light-emitting diode array can employ active illumination for alignment purposes. Based on the principles of single-pixel imaging, structured illumination can be used to obtain position information via compressive sensing. The positions of markers with certain spectral signatures can be extracted from the recorded hyperspectral data through spectral filtering, spectral fitting, or principal component analysis. Its application to direct writing is demonstrated by creating individual photolithography patterns aligned with different types of fluorophores on the same substrate.

AB - Direct writing systems equipped with a confocal micro-light-emitting diode array can employ active illumination for alignment purposes. Based on the principles of single-pixel imaging, structured illumination can be used to obtain position information via compressive sensing. The positions of markers with certain spectral signatures can be extracted from the recorded hyperspectral data through spectral filtering, spectral fitting, or principal component analysis. Its application to direct writing is demonstrated by creating individual photolithography patterns aligned with different types of fluorophores on the same substrate.

KW - structured illumination

KW - micro-LED arrays

KW - hyperspectral imaging

KW - automated alignment

UR - https://www.scopus.com/pages/publications/105004411233

U2 - 10.1088/2040-8986/adcfb0

DO - 10.1088/2040-8986/adcfb0

M3 - Article

SN - 0972-8821

VL - 27

JO - Journal of Optics

JF - Journal of Optics

IS - 5

M1 - 055402

ER -

Hyperspectral alignment capability for direct writing systems enabled by structured illumination with a micro-LED array

Abstract

Funding

Keywords

Access to Document

Other files and links

Fingerprint

Data for: Hyperspectral alignment capability for direct writing systems enabled by structured illumination with a micro-LED array

Cite this

Hyperspectral alignment capability for direct writing systems enabled by structured illumination with a micro-LED array

Abstract

Funding

Keywords

Access to Document

Other files and links

Fingerprint

Datasets

Data for: Hyperspectral alignment capability for direct writing systems enabled by structured illumination with a micro-LED array

Cite this