Hybridisation of diamond with silicon photonic resonators

Integrating single crystal diamond membranes with established on-chip photonics will help realise many applications such as scalable solid-state spin entanglement. Current limitations in the dimensions of available optical grade diamond hinder its use in photonic circuitry. Here we show that hybrid diamond devices can be micro-assembled using free-standing diamond membranes and liquid mediated capillary bonding to other photonic platforms. Deformation of the membrane over silicon-on-insulator (SOI) resonator structures is shown and characterised using scanning electron microscopy measurements (SEM), interference fringe analysis, and optical measurements - showing a low added noise of < 0.4 dB.