Abstract
Experimental evaluation and performance results of a tunable optical filter based on hybrid microoptoelectromechanical systems technology are described in this letter. The hybrid optical microsystem is built using an off-the-shelf 200-GHz dense wavelength-division-multiplexing interference filter and a rotary microelectromechanical systems platform, suspended and actuated by an array of thermal microactuators fabricated through a commercially available process (SOIMUMPs). Results show a tuning range of over 870 pm, which satisfies the demodulation requirements for fiber Bragg grating sensors.
| Original language | English |
|---|---|
| Pages (from-to) | 202-204 |
| Number of pages | 2 |
| Journal | IEEE Photonics Technology Letters |
| Volume | 17 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - Dec 2004 |
Keywords
- Bragg gratings
- demodulation
- fibre optic sensors
- interference filters
- micro-optics
- microactuators
- optical arrays
- optical tuning
- wavelength
- division multiplexing
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