Hybrid MOEMS tunable filter for interrogation of fiber Bragg grating sensors

A. Unamuno, D.G. Uttamchandani

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Experimental evaluation and performance results of a tunable optical filter based on hybrid microoptoelectromechanical systems technology are described in this letter. The hybrid optical microsystem is built using an off-the-shelf 200-GHz dense wavelength-division-multiplexing interference filter and a rotary microelectromechanical systems platform, suspended and actuated by an array of thermal microactuators fabricated through a commercially available process (SOIMUMPs). Results show a tuning range of over 870 pm, which satisfies the demodulation requirements for fiber Bragg grating sensors.
LanguageEnglish
Pages202-204
Number of pages2
JournalIEEE Photonics Technology Letters
Volume17
Issue number1
DOIs
Publication statusPublished - Dec 2004

Fingerprint

MOEMS
microoptoelectromechanical systems
Microactuators
Dense wavelength division multiplexing
Optical filters
tunable filters
Microsystems
interrogation
optical filters
demodulation
Fiber Bragg gratings
wavelength division multiplexing
Demodulation
shelves
Bragg gratings
microelectromechanical systems
MEMS
platforms
Tuning
tuning

Keywords

  • Bragg gratings
  • demodulation
  • fibre optic sensors
  • interference filters
  • micro-optics
  • microactuators
  • optical arrays
  • optical tuning
  • wavelength
  • division multiplexing

Cite this

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Hybrid MOEMS tunable filter for interrogation of fiber Bragg grating sensors. / Unamuno, A.; Uttamchandani, D.G.

In: IEEE Photonics Technology Letters, Vol. 17, No. 1, 12.2004, p. 202-204.

Research output: Contribution to journalArticle

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