Hybrid MOEMS tunable filter for interrogation of fiber Bragg grating sensors

A. Unamuno; D.G. Uttamchandani

doi:10.1109/LPT.2004.837746

Hybrid MOEMS tunable filter for interrogation of fiber Bragg grating sensors

A. Unamuno, D.G. Uttamchandani

Electronic And Electrical Engineering

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Experimental evaluation and performance results of a tunable optical filter based on hybrid microoptoelectromechanical systems technology are described in this letter. The hybrid optical microsystem is built using an off-the-shelf 200-GHz dense wavelength-division-multiplexing interference filter and a rotary microelectromechanical systems platform, suspended and actuated by an array of thermal microactuators fabricated through a commercially available process (SOIMUMPs). Results show a tuning range of over 870 pm, which satisfies the demodulation requirements for fiber Bragg grating sensors.

Original language	English
Pages (from-to)	202-204
Number of pages	2
Journal	IEEE Photonics Technology Letters
Volume	17
Issue number	1
DOIs	https://doi.org/10.1109/LPT.2004.837746
Publication status	Published - Dec 2004

Keywords

Bragg gratings
demodulation
fibre optic sensors
interference filters
micro-optics
microactuators
optical arrays
optical tuning
wavelength
division multiplexing

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10.1109/LPT.2004.837746

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title = "Hybrid MOEMS tunable filter for interrogation of fiber Bragg grating sensors",

abstract = "Experimental evaluation and performance results of a tunable optical filter based on hybrid microoptoelectromechanical systems technology are described in this letter. The hybrid optical microsystem is built using an off-the-shelf 200-GHz dense wavelength-division-multiplexing interference filter and a rotary microelectromechanical systems platform, suspended and actuated by an array of thermal microactuators fabricated through a commercially available process (SOIMUMPs). Results show a tuning range of over 870 pm, which satisfies the demodulation requirements for fiber Bragg grating sensors.",

keywords = "Bragg gratings, demodulation, fibre optic sensors, interference filters, micro-optics, microactuators, optical arrays, optical tuning, wavelength, division multiplexing",

author = "A. Unamuno and D.G. Uttamchandani",

year = "2004",

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AU - Unamuno, A.

AU - Uttamchandani, D.G.

PY - 2004/12

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N2 - Experimental evaluation and performance results of a tunable optical filter based on hybrid microoptoelectromechanical systems technology are described in this letter. The hybrid optical microsystem is built using an off-the-shelf 200-GHz dense wavelength-division-multiplexing interference filter and a rotary microelectromechanical systems platform, suspended and actuated by an array of thermal microactuators fabricated through a commercially available process (SOIMUMPs). Results show a tuning range of over 870 pm, which satisfies the demodulation requirements for fiber Bragg grating sensors.

AB - Experimental evaluation and performance results of a tunable optical filter based on hybrid microoptoelectromechanical systems technology are described in this letter. The hybrid optical microsystem is built using an off-the-shelf 200-GHz dense wavelength-division-multiplexing interference filter and a rotary microelectromechanical systems platform, suspended and actuated by an array of thermal microactuators fabricated through a commercially available process (SOIMUMPs). Results show a tuning range of over 870 pm, which satisfies the demodulation requirements for fiber Bragg grating sensors.

KW - Bragg gratings

KW - demodulation

KW - fibre optic sensors

KW - interference filters

KW - micro-optics

KW - microactuators

KW - optical arrays

KW - optical tuning

KW - wavelength

KW - division multiplexing

UR - http://dx.doi.org/10.1109/LPT.2004.837746

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DO - 10.1109/LPT.2004.837746

M3 - Article

SN - 1041-1135

VL - 17

SP - 202

EP - 204

JO - IEEE Photonics Technology Letters

JF - IEEE Photonics Technology Letters

IS - 1

ER -

Hybrid MOEMS tunable filter for interrogation of fiber Bragg grating sensors

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Keywords

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