High-resolution cathodoluminescence hyperspectral imaging of nitride nanostructures

Paul R. Edwards, Lethy Krishnan Jagadamma, Jochen Bruckbauer, Chaowang Liu, Philip Shields, Duncan Allsopp, Tao Wang, Robert W. Martin

Research output: Contribution to journalArticle

36 Citations (Scopus)
139 Downloads (Pure)

Abstract

Hyperspectral cathodoluminescence imaging provides spectrally and spatially resolved information on luminescent materials within a single dataset. Pushing the technique toward its ultimate nanoscale spatial limit, while at the same time spectrally dispersing the collected light before detection, increases the challenge of generating low-noise images. This article describes aspects of the instrumentation, and in particular data treatment methods, which address this problem. The methods are demonstrated by applying them to the analysis of nanoscale defect features and fabricated nanostructures in III-nitride-based materials.
Original languageEnglish
Pages (from-to)1212-1219
Number of pages8
JournalMicroscopy and Microanalysis
Volume18
Issue number6
Early online date5 Dec 2012
DOIs
Publication statusPublished - Dec 2012

Keywords

  • cathodoluminescence
  • hyperspectral imaging
  • gallium nitride
  • principal component analysis
  • multivariate statistical analysis
  • SEM

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