We present a transfer printing technique with sub-100nm absolute placement accuracy. Hybrid integration of pre-processed membrane waveguide devices is achieved across a range of materials, including silicon, polymer and III-V devices.
|Number of pages||2|
|Publication status||Published - 5 Jul 2018|
|Event||Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018 - Zurich, Switzerland|
Duration: 2 Jul 2018 → 5 Jul 2018
|Conference||Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018|
|Abbreviated title||IPR 2018|
|Period||2/07/18 → 5/07/18|
- transfer printing technique
McPhillimy, J. R., Guilhabert, B., Klitis, C., May, S., Dawson, M. D., Sorel, M., & Strain, M. J. (2018). High precision transfer printing for hybrid integration of multi-material waveguide devices. Paper presented at Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018, Zurich, Switzerland.