High precision transfer printing for hybrid integration of multi-material waveguide devices

John R. McPhillimy, Benoit Guilhabert, Charalambos Klitis, Stuart May, Martin D. Dawson, Marc Sorel, Michael J. Strain

Research output: Contribution to conferencePaper

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Abstract

We present a transfer printing technique with sub-100nm absolute placement accuracy. Hybrid integration of pre-processed membrane waveguide devices is achieved across a range of materials, including silicon, polymer and III-V devices.

Conference

ConferenceAdvanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018
Abbreviated titleIPR 2018
CountrySwitzerland
CityZurich
Period2/07/185/07/18
Internet address

Keywords

  • transfer printing technique
  • silicon
  • polymer
  • III-V-on-silicon

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  • Cite this

    McPhillimy, J. R., Guilhabert, B., Klitis, C., May, S., Dawson, M. D., Sorel, M., & Strain, M. J. (2018). High precision transfer printing for hybrid integration of multi-material waveguide devices. Paper presented at Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018, Zurich, Switzerland.