High precision transfer printing for hybrid integration of multi-material waveguide devices

John R. McPhillimy, Benoit Guilhabert, Charalambos Klitis, Stuart May, Martin D. Dawson, Marc Sorel, Michael J. Strain

Research output: Contribution to conferencePaper

Abstract

We present a transfer printing technique with sub-100nm absolute placement accuracy. Hybrid integration of pre-processed membrane waveguide devices is achieved across a range of materials, including silicon, polymer and III-V devices.

Fingerprint

printing
silicon polymers
waveguides
membranes

Keywords

  • transfer printing technique
  • silicon
  • polymer
  • III-V-on-silicon

Cite this

McPhillimy, J. R., Guilhabert, B., Klitis, C., May, S., Dawson, M. D., Sorel, M., & Strain, M. J. (2018). High precision transfer printing for hybrid integration of multi-material waveguide devices. Paper presented at Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018, Zurich, Switzerland.
McPhillimy, John R. ; Guilhabert, Benoit ; Klitis, Charalambos ; May, Stuart ; Dawson, Martin D. ; Sorel, Marc ; Strain, Michael J./ High precision transfer printing for hybrid integration of multi-material waveguide devices. Paper presented at Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018, Zurich, Switzerland.2 p.
@conference{2bf18ecebb00421a98bc350130b76d08,
title = "High precision transfer printing for hybrid integration of multi-material waveguide devices",
abstract = "We present a transfer printing technique with sub-100nm absolute placement accuracy. Hybrid integration of pre-processed membrane waveguide devices is achieved across a range of materials, including silicon, polymer and III-V devices.",
keywords = "transfer printing technique, silicon, polymer, III-V-on-silicon",
author = "McPhillimy, {John R.} and Benoit Guilhabert and Charalambos Klitis and Stuart May and Dawson, {Martin D.} and Marc Sorel and Strain, {Michael J.}",
year = "2018",
month = "7",
day = "5",
language = "English",
note = "Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018, IPR 2018 ; Conference date: 02-07-2018 Through 05-07-2018",
url = "https://www.osa.org/en-us/meetings/osa_meetings/advanced_photonics_congress/program/integrated_photonics_research_silicon_and_nano-p/",

}

McPhillimy, JR, Guilhabert, B, Klitis, C, May, S, Dawson, MD, Sorel, M & Strain, MJ 2018, 'High precision transfer printing for hybrid integration of multi-material waveguide devices' Paper presented at Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018, Zurich, Switzerland, 2/07/18 - 5/07/18, .

High precision transfer printing for hybrid integration of multi-material waveguide devices. / McPhillimy, John R.; Guilhabert, Benoit; Klitis, Charalambos; May, Stuart; Dawson, Martin D.; Sorel, Marc; Strain, Michael J.

2018. Paper presented at Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018, Zurich, Switzerland.

Research output: Contribution to conferencePaper

TY - CONF

T1 - High precision transfer printing for hybrid integration of multi-material waveguide devices

AU - McPhillimy,John R.

AU - Guilhabert,Benoit

AU - Klitis,Charalambos

AU - May,Stuart

AU - Dawson,Martin D.

AU - Sorel,Marc

AU - Strain,Michael J.

PY - 2018/7/5

Y1 - 2018/7/5

N2 - We present a transfer printing technique with sub-100nm absolute placement accuracy. Hybrid integration of pre-processed membrane waveguide devices is achieved across a range of materials, including silicon, polymer and III-V devices.

AB - We present a transfer printing technique with sub-100nm absolute placement accuracy. Hybrid integration of pre-processed membrane waveguide devices is achieved across a range of materials, including silicon, polymer and III-V devices.

KW - transfer printing technique

KW - silicon

KW - polymer

KW - III-V-on-silicon

M3 - Paper

ER -

McPhillimy JR, Guilhabert B, Klitis C, May S, Dawson MD, Sorel M et al. High precision transfer printing for hybrid integration of multi-material waveguide devices. 2018. Paper presented at Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018, Zurich, Switzerland.