High precision transfer printing for hybrid integration of multi-material waveguide devices

John R. McPhillimy; Benoit Guilhabert; Charalambos Klitis; Stuart May; Martin D. Dawson; Marc Sorel; Michael J. Strain

High precision transfer printing for hybrid integration of multi-material waveguide devices

John R. McPhillimy, Benoit Guilhabert, Charalambos Klitis, Stuart May, Martin D. Dawson, Marc Sorel, Michael J. Strain

Research output: Contribution to conference › Paper › peer-review

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Abstract

We present a transfer printing technique with sub-100nm absolute placement accuracy. Hybrid integration of pre-processed membrane waveguide devices is achieved across a range of materials, including silicon, polymer and III-V devices.

Original language	English
Number of pages	2
Publication status	Published - 5 Jul 2018
Event	Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018 - Zurich, Switzerland Duration: 2 Jul 2018 → 5 Jul 2018 https://www.osa.org/en-us/meetings/osa_meetings/advanced_photonics_congress/program/integrated_photonics_research_silicon_and_nano-p/

Conference

Conference	Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018
Abbreviated title	IPR 2018
Country/Territory	Switzerland
City	Zurich
Period	2/07/18 → 5/07/18
Internet address	https://www.osa.org/en-us/meetings/osa_meetings/advanced_photonics_congress/program/integrated_photonics_research_silicon_and_nano-p/

Keywords

transfer printing technique
silicon
polymer
III-V-on-silicon

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McPhillimy-etal-2018-High-precision-transfer-printing-for-hybrid-integration-of-multi-material-waveguide-devicesAccepted author manuscript, 0.99 MB

Cite this

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title = "High precision transfer printing for hybrid integration of multi-material waveguide devices",

abstract = "We present a transfer printing technique with sub-100nm absolute placement accuracy. Hybrid integration of pre-processed membrane waveguide devices is achieved across a range of materials, including silicon, polymer and III-V devices.",

keywords = "transfer printing technique, silicon, polymer, III-V-on-silicon",

author = "McPhillimy, {John R.} and Benoit Guilhabert and Charalambos Klitis and Stuart May and Dawson, {Martin D.} and Marc Sorel and Strain, {Michael J.}",

year = "2018",

month = jul,

day = "5",

language = "English",

note = "Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018, IPR 2018 ; Conference date: 02-07-2018 Through 05-07-2018",

url = "https://www.osa.org/en-us/meetings/osa_meetings/advanced_photonics_congress/program/integrated_photonics_research_silicon_and_nano-p/",

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High precision transfer printing for hybrid integration of multi-material waveguide devices. / McPhillimy, John R.; Guilhabert, Benoit; Klitis, Charalambos et al.
2018. Paper presented at Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018, Zurich, Switzerland.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - High precision transfer printing for hybrid integration of multi-material waveguide devices

AU - McPhillimy, John R.

AU - Guilhabert, Benoit

AU - Klitis, Charalambos

AU - May, Stuart

AU - Dawson, Martin D.

AU - Sorel, Marc

AU - Strain, Michael J.

PY - 2018/7/5

Y1 - 2018/7/5

N2 - We present a transfer printing technique with sub-100nm absolute placement accuracy. Hybrid integration of pre-processed membrane waveguide devices is achieved across a range of materials, including silicon, polymer and III-V devices.

AB - We present a transfer printing technique with sub-100nm absolute placement accuracy. Hybrid integration of pre-processed membrane waveguide devices is achieved across a range of materials, including silicon, polymer and III-V devices.

KW - transfer printing technique

KW - silicon

KW - polymer

KW - III-V-on-silicon

M3 - Paper

T2 - Advanced Photonics Congress - Integrated Photonics Research, Silicon, and Nano-Photonics 2018

Y2 - 2 July 2018 through 5 July 2018

ER -

High precision transfer printing for hybrid integration of multi-material waveguide devices

Abstract

Conference

Keywords

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Cite this