High precision detection of change in intermediate range order of amorphous zirconia-doped tantala thin films due to annealing

K. Prasai, J. Jiang, A. Mishkin, B. Shyam, S. Angelova, R. Birney, D. A. Drabold, M. Fazio, E. K. Gustafson, G. Harry, S. Hoback, J. Hough, C. Lévesque, I. MacLaren, A. Markosyan, I. W. Martin, C. S. Menoni, P. G. Murray, S. Penn, S. ReidR. Robie, S. Rowan, F. Schiettekatte, R. Shink, A. Turner, G. Vajente, H-P. Cheng, M. M. Fejer, A. Mehta, R. Bassiri

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Abstract

Understanding the local atomic order in amorphous thin film coatings and how it relates to macroscopic performance factors, such as mechanical loss, provides an important path towards enabling the accelerated discovery and development of improved coatings. High precision x-ray scattering measurements of thin films of amorphous zirconia-doped tantala (ZrO2−Ta2O5) show systematic changes in intermediate range order (IRO) as a function of postdeposition heat treatment (annealing). Atomic modeling captures and explains these changes, and shows that the material has building blocks of metal-centered polyhedra and the effect of annealing is to alter the connections between the polyhedra. The observed changes in IRO are associated with a shift in the ratio of corner-sharing to edge-sharing polyhedra. These changes correlate with changes in mechanical loss upon annealing, and suggest that the mechanical loss can be reduced by developing a material with a designed ratio of corner-sharing to edge-sharing polyhedra.
Original languageEnglish
Article number045501
Number of pages6
JournalPhysical Review Letters
Volume123
Issue number4
Early online date23 Jul 2019
DOIs
Publication statusE-pub ahead of print - 23 Jul 2019

Keywords

  • gravitational waves
  • amorphous materials
  • glasses
  • thin films
  • molecular dynamics
  • X-ray scattering

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