High accuracy transfer printing of single-mode membrane silicon photonic devices

John McPhillimy; Benoit Guilhabert; Charalambos Klitis; Martin D. Dawson; Marc Sorel; Michael J. Strain

doi:10.1364/OE.26.016679

High accuracy transfer printing of single-mode membrane silicon photonic devices

John McPhillimy, Benoit Guilhabert, Charalambos Klitis, Martin D. Dawson, Marc Sorel, Michael J. Strain

Research output: Contribution to journal › Article › peer-review

41 Citations (Scopus)

51 Downloads (Pure)

Abstract

A transfer printing (TP) method is presented for the micro-assembly of integrated photonic devices from suspended membrane components. Ultra thin membranes with thickness of 150nm are directly printed without the use of mechanical support and adhesion layers. By using a correlation alignment scheme vertical integration of single-mode silicon waveguides is achieved with an average placement accuracy of 100±70nm. Silicon (Si) µ-ring resonators are also fabricated and show controllable optical coupling by varying the lateral absolute position to an
underlying Si bus waveguide.

Original language	English
Pages (from-to)	16679-16688
Number of pages	10
Journal	Optics Express
Volume	26
Issue number	13
Early online date	14 Jun 2018
DOIs	https://doi.org/10.1364/OE.26.016679
Publication status	Published - 25 Jun 2018

Keywords

transfer printing (TP) method
micro-assembly
integrated photonic devices
ultra thin membranes

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10.1364/OE.26.016679Licence: CC BY 4.0

McPhillimy-etal-OE-2018-High-accuracy-transfer-printing-of-single-mode-membrane-silicon-photonic-devicesFinal published version, 3.53 MBLicence: CC BY 4.0

Cite this

@article{9350f3622a3b47b28ed45602931bfbca,

title = "High accuracy transfer printing of single-mode membrane silicon photonic devices",

abstract = "A transfer printing (TP) method is presented for the micro-assembly of integrated photonic devices from suspended membrane components. Ultra thin membranes with thickness of 150nm are directly printed without the use of mechanical support and adhesion layers. By using a correlation alignment scheme vertical integration of single-mode silicon waveguides is achieved with an average placement accuracy of 100±70nm. Silicon (Si) µ-ring resonators are also fabricated and show controllable optical coupling by varying the lateral absolute position to an underlying Si bus waveguide.",

keywords = "transfer printing (TP) method, micro-assembly, integrated photonic devices , ultra thin membranes",

author = "John McPhillimy and Benoit Guilhabert and Charalambos Klitis and Dawson, \{Martin D.\} and Marc Sorel and Strain, \{Michael J.\}",

year = "2018",

month = jun,

day = "25",

doi = "10.1364/OE.26.016679",

language = "English",

volume = "26",

pages = "16679--16688",

journal = "Optics Express",

issn = "1094-4087",

publisher = "Optical Society of America",

number = "13",

}

TY - JOUR

T1 - High accuracy transfer printing of single-mode membrane silicon photonic devices

AU - McPhillimy, John

AU - Guilhabert, Benoit

AU - Klitis, Charalambos

AU - Dawson, Martin D.

AU - Sorel, Marc

AU - Strain, Michael J.

PY - 2018/6/25

Y1 - 2018/6/25

N2 - A transfer printing (TP) method is presented for the micro-assembly of integrated photonic devices from suspended membrane components. Ultra thin membranes with thickness of 150nm are directly printed without the use of mechanical support and adhesion layers. By using a correlation alignment scheme vertical integration of single-mode silicon waveguides is achieved with an average placement accuracy of 100±70nm. Silicon (Si) µ-ring resonators are also fabricated and show controllable optical coupling by varying the lateral absolute position to an underlying Si bus waveguide.

AB - A transfer printing (TP) method is presented for the micro-assembly of integrated photonic devices from suspended membrane components. Ultra thin membranes with thickness of 150nm are directly printed without the use of mechanical support and adhesion layers. By using a correlation alignment scheme vertical integration of single-mode silicon waveguides is achieved with an average placement accuracy of 100±70nm. Silicon (Si) µ-ring resonators are also fabricated and show controllable optical coupling by varying the lateral absolute position to an underlying Si bus waveguide.

KW - transfer printing (TP) method

KW - micro-assembly

KW - integrated photonic devices

KW - ultra thin membranes

UR - https://osapublishing.org/oe/home.cfm

U2 - 10.1364/OE.26.016679

DO - 10.1364/OE.26.016679

M3 - Article

SN - 1094-4087

VL - 26

SP - 16679

EP - 16688

JO - Optics Express

JF - Optics Express

IS - 13

ER -

High accuracy transfer printing of single-mode membrane silicon photonic devices

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Parallel Heterogeneous Integration of III-V Devices on Silicon Photonic Chips

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High accuracy transfer printing of single-mode membrane silicon photonic devices

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Parallel Heterogeneous Integration of III-V Devices on Silicon Photonic Chips

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Data for: "High accuracy transfer printing of single-mode membrane silicon photonic devices"

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