High accuracy transfer printing of single-mode membrane silicon photonic devices

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

A transfer printing (TP) method is presented for the micro-assembly of integrated photonic devices from suspended membrane components. Ultra thin membranes with thickness of 150nm are directly printed without the use of mechanical support and adhesion layers. By using a correlation alignment scheme vertical integration of single-mode silicon waveguides is achieved with an average placement accuracy of 100±70nm. Silicon (Si) µ-ring resonators are also fabricated and show controllable optical coupling by varying the lateral absolute position to an
underlying Si bus waveguide.
LanguageEnglish
Pages16679-16688
Number of pages10
JournalOptics Express
Volume26
Issue number13
Early online date14 Jun 2018
DOIs
Publication statusPublished - 25 Jun 2018

Fingerprint

printing
photonics
membranes
silicon
waveguides
optical coupling
adhesion
assembly
resonators
alignment
rings

Keywords

  • transfer printing (TP) method
  • micro-assembly
  • integrated photonic devices
  • ultra thin membranes

Cite this

@article{9350f3622a3b47b28ed45602931bfbca,
title = "High accuracy transfer printing of single-mode membrane silicon photonic devices",
abstract = "A transfer printing (TP) method is presented for the micro-assembly of integrated photonic devices from suspended membrane components. Ultra thin membranes with thickness of 150nm are directly printed without the use of mechanical support and adhesion layers. By using a correlation alignment scheme vertical integration of single-mode silicon waveguides is achieved with an average placement accuracy of 100±70nm. Silicon (Si) µ-ring resonators are also fabricated and show controllable optical coupling by varying the lateral absolute position to anunderlying Si bus waveguide.",
keywords = "transfer printing (TP) method, micro-assembly, integrated photonic devices , ultra thin membranes",
author = "John McPhillimy and Benoit Guilhabert and Charalambos Klitis and Dawson, {Martin D.} and Marc Sorel and Strain, {Michael J.}",
year = "2018",
month = "6",
day = "25",
doi = "10.1364/OE.26.016679",
language = "English",
volume = "26",
pages = "16679--16688",
journal = "Optics Express",
issn = "1094-4087",
publisher = "Optical Society of America",
number = "13",

}

High accuracy transfer printing of single-mode membrane silicon photonic devices. / McPhillimy, John; Guilhabert, Benoit; Klitis, Charalambos; Dawson, Martin D.; Sorel, Marc; Strain, Michael J.

In: Optics Express, Vol. 26, No. 13, 25.06.2018, p. 16679-16688.

Research output: Contribution to journalArticle

TY - JOUR

T1 - High accuracy transfer printing of single-mode membrane silicon photonic devices

AU - McPhillimy, John

AU - Guilhabert, Benoit

AU - Klitis, Charalambos

AU - Dawson, Martin D.

AU - Sorel, Marc

AU - Strain, Michael J.

PY - 2018/6/25

Y1 - 2018/6/25

N2 - A transfer printing (TP) method is presented for the micro-assembly of integrated photonic devices from suspended membrane components. Ultra thin membranes with thickness of 150nm are directly printed without the use of mechanical support and adhesion layers. By using a correlation alignment scheme vertical integration of single-mode silicon waveguides is achieved with an average placement accuracy of 100±70nm. Silicon (Si) µ-ring resonators are also fabricated and show controllable optical coupling by varying the lateral absolute position to anunderlying Si bus waveguide.

AB - A transfer printing (TP) method is presented for the micro-assembly of integrated photonic devices from suspended membrane components. Ultra thin membranes with thickness of 150nm are directly printed without the use of mechanical support and adhesion layers. By using a correlation alignment scheme vertical integration of single-mode silicon waveguides is achieved with an average placement accuracy of 100±70nm. Silicon (Si) µ-ring resonators are also fabricated and show controllable optical coupling by varying the lateral absolute position to anunderlying Si bus waveguide.

KW - transfer printing (TP) method

KW - micro-assembly

KW - integrated photonic devices

KW - ultra thin membranes

UR - https://osapublishing.org/oe/home.cfm

U2 - 10.1364/OE.26.016679

DO - 10.1364/OE.26.016679

M3 - Article

VL - 26

SP - 16679

EP - 16688

JO - Optics Express

T2 - Optics Express

JF - Optics Express

SN - 1094-4087

IS - 13

ER -