High accuracy transfer printing of single-mode membrane silicon photonic devices

John McPhillimy, Benoit Guilhabert, Charalambos Klitis, Martin D. Dawson, Marc Sorel, Michael J. Strain

Research output: Contribution to journalArticle

13 Citations (Scopus)
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Abstract

A transfer printing (TP) method is presented for the micro-assembly of integrated photonic devices from suspended membrane components. Ultra thin membranes with thickness of 150nm are directly printed without the use of mechanical support and adhesion layers. By using a correlation alignment scheme vertical integration of single-mode silicon waveguides is achieved with an average placement accuracy of 100±70nm. Silicon (Si) µ-ring resonators are also fabricated and show controllable optical coupling by varying the lateral absolute position to an
underlying Si bus waveguide.
Original languageEnglish
Pages (from-to)16679-16688
Number of pages10
JournalOptics Express
Volume26
Issue number13
Early online date14 Jun 2018
DOIs
Publication statusPublished - 25 Jun 2018

Keywords

  • transfer printing (TP) method
  • micro-assembly
  • integrated photonic devices
  • ultra thin membranes

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