GaN micro-LED arrays with integrated sapphire micro-lenses

H.W. Choi, C.W. Jeon, C. Liu, M.D. Dawson

Research output: Chapter in Book/Report/Conference proceedingChapter

2 Citations (Scopus)

Abstract

GaN micro-LED devices with integrated micro-lenses have been demonstrated. The micro-lenses, with a focal length of 24 microns, are fabricated on the polished backside of the sapphire substrate by ICP etching.
LanguageEnglish
Title of host publicationLEOS 2003: 16th Annual Meeting of the IEEE Lasers & Electro-Optics Society
PublisherIEEE
Pages654-655
Number of pages1
Volume2
ISBN (Print)0-7803-7888-1
DOIs
Publication statusPublished - 28 Oct 2003

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sapphire
light emitting diodes
lenses
etching

Keywords

  • gallium compounds
  • integrated optics
  • light emitting diodes
  • LED
  • microlenses
  • optical arrays
  • optical fabrication
  • sapphire
  • sputter etching
  • surface roughness
  • wide band gap semiconductors
  • Non-controlled Indexing

Cite this

Choi, H. W., Jeon, C. W., Liu, C., & Dawson, M. D. (2003). GaN micro-LED arrays with integrated sapphire micro-lenses. In LEOS 2003: 16th Annual Meeting of the IEEE Lasers & Electro-Optics Society (Vol. 2, pp. 654-655). IEEE. https://doi.org/10.1109/LEOS.2003.1252970
Choi, H.W. ; Jeon, C.W. ; Liu, C. ; Dawson, M.D. / GaN micro-LED arrays with integrated sapphire micro-lenses. LEOS 2003: 16th Annual Meeting of the IEEE Lasers & Electro-Optics Society. Vol. 2 IEEE, 2003. pp. 654-655
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Choi, HW, Jeon, CW, Liu, C & Dawson, MD 2003, GaN micro-LED arrays with integrated sapphire micro-lenses. in LEOS 2003: 16th Annual Meeting of the IEEE Lasers & Electro-Optics Society. vol. 2, IEEE, pp. 654-655. https://doi.org/10.1109/LEOS.2003.1252970

GaN micro-LED arrays with integrated sapphire micro-lenses. / Choi, H.W.; Jeon, C.W.; Liu, C.; Dawson, M.D.

LEOS 2003: 16th Annual Meeting of the IEEE Lasers & Electro-Optics Society. Vol. 2 IEEE, 2003. p. 654-655.

Research output: Chapter in Book/Report/Conference proceedingChapter

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T1 - GaN micro-LED arrays with integrated sapphire micro-lenses

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KW - light emitting diodes

KW - LED

KW - microlenses

KW - optical arrays

KW - optical fabrication

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KW - sputter etching

KW - surface roughness

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KW - Non-controlled Indexing

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Choi HW, Jeon CW, Liu C, Dawson MD. GaN micro-LED arrays with integrated sapphire micro-lenses. In LEOS 2003: 16th Annual Meeting of the IEEE Lasers & Electro-Optics Society. Vol. 2. IEEE. 2003. p. 654-655 https://doi.org/10.1109/LEOS.2003.1252970