GaN micro-LED arrays with integrated sapphire micro-lenses

H.W. Choi, C.W. Jeon, C. Liu, M.D. Dawson

Research output: Chapter in Book/Report/Conference proceedingChapter

2 Citations (Scopus)

Abstract

GaN micro-LED devices with integrated micro-lenses have been demonstrated. The micro-lenses, with a focal length of 24 microns, are fabricated on the polished backside of the sapphire substrate by ICP etching.
Original languageEnglish
Title of host publicationLEOS 2003: 16th Annual Meeting of the IEEE Lasers & Electro-Optics Society
PublisherIEEE
Pages654-655
Number of pages1
Volume2
ISBN (Print)0-7803-7888-1
DOIs
Publication statusPublished - 28 Oct 2003

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Keywords

  • gallium compounds
  • integrated optics
  • light emitting diodes
  • LED
  • microlenses
  • optical arrays
  • optical fabrication
  • sapphire
  • sputter etching
  • surface roughness
  • wide band gap semiconductors
  • Non-controlled Indexing

Cite this

Choi, H. W., Jeon, C. W., Liu, C., & Dawson, M. D. (2003). GaN micro-LED arrays with integrated sapphire micro-lenses. In LEOS 2003: 16th Annual Meeting of the IEEE Lasers & Electro-Optics Society (Vol. 2, pp. 654-655). IEEE. https://doi.org/10.1109/LEOS.2003.1252970