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Silicon nitride (Si 3 N 4 ) is an excellent material platform for visible wavelength photonic integrated circuits, in particular, as a host for the heterogeneous/hybrid integration of complementary materials. In this work, we characterise the performance of the Si 3 N 4 from LIGENTEC as a base for hybrid integration.
|Title of host publication||2023 IEEE Photonics Society Summer Topicals Meeting Series (SUM)|
|Place of Publication||Piscataway, NJ|
|Number of pages||2|
|Publication status||Published - 23 Aug 2023|
|Name||2023 IEEE Photonics Society Summer Topicals Meeting Series (SUM)|
- silicon nitride
- photonic integrated circuit
- heterogeneous integration
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