Focused ion beam nanoSQUIDs as novel NEMS resonator readouts

Ling Hao, John C. Gallop, David Cox, Edward J. Romans, John Cameron MacFarlane, Jie Chen

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)
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Nano electromechanical systems (NEMS) represent an important new class of device with wide ranging applications. In this paper we report proposals and calculations for novel methods for excitation and readout of cantilever-style NEMS resonators which are applicable over a wide temperature range. We suggest a Lorentz force-based excitation method and discuss an ultrasensitive readout provided by a nanoSQUID, where the cantilever vibration modulates the inductance of the nanoSQUID loop, allowing potentially sub-picometer amplitude sensitivity to be achieved.
Original languageEnglish
Pages (from-to)693-696
Number of pages4
JournalIEEE Transactions on Applied Superconductivity
Issue number3
Publication statusPublished - Jun 2009


  • mechanical resonators
  • NanoSQUIDs
  • NEMS


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