Focused ion beam machining of an in-fibre 45(SiC) mirror for fibre end sensors

J. Li, J. N. Sun, M. M. Miliar, J. M. Ritchie, Xichun Luo, R. R. J. Maier, D. P. Hand, W. N. MacPherson

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

2 Citations (Scopus)


Focussed Ion Beam (FIB) machining has been demonstrated to be capable of fabricating nano and micro-structure elements. In this paper we demonstrate techniques to design and fabricate a 45° mirror on the end of both conventional single mode and multi-core fibres (MCF) using FIB processing. The mirror is finished by a two step process: first a scanning process is used to make a rough cut followed by a polishing process to create an optical surface finish. The machined 45° mirror can be accurately aligned with optical fibre core, which avoids issues associated with the alignment of external turning mirror components. Proof-of-concept tests demonstrate that the fabricated structure is capable of measuring two axis displacements interferometrically with a maximum displacement up to 1.0mm and an rms error of ~50nm. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Original languageEnglish
Title of host publicationFifth European Workshop on Optical Fibre Sensors
EditorsLeszek R. Jaroszewicz
Publication statusPublished - 2013
EventFifth European Workshop on Optical Fibre Sensors - , Poland
Duration: 19 May 201322 May 2013

Publication series

NameProceedings of SPIE
ISSN (Print)0277-786X


WorkshopFifth European Workshop on Optical Fibre Sensors


  • ion beams
  • mirrors
  • sensors
  • optical fibers
  • polishing
  • scanning


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