Focussed Ion Beam (FIB) machining has been demonstrated to be capable of fabricating nano and micro-structure elements. In this paper we demonstrate techniques to design and fabricate a 45° mirror on the end of both conventional single mode and multi-core fibres (MCF) using FIB processing. The mirror is finished by a two step process: first a scanning process is used to make a rough cut followed by a polishing process to create an optical surface finish. The machined 45° mirror can be accurately aligned with optical fibre core, which avoids issues associated with the alignment of external turning mirror components. Proof-of-concept tests demonstrate that the fabricated structure is capable of measuring two axis displacements interferometrically with a maximum displacement up to 1.0mm and an rms error of ~50nm. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
|Name||Proceedings of SPIE|
|Workshop||Fifth European Workshop on Optical Fibre Sensors|
|Period||19/05/13 → 22/05/13|
- ion beams
- optical fibers