Focused ion beam machining of an in-fibre 45(SiC) mirror for fibre end sensors

J. Li, J. N. Sun, M. M. Miliar, J. M. Ritchie, Xichun Luo, R. R. J. Maier, D. P. Hand, W. N. MacPherson

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

2 Citations (Scopus)

Abstract

Focussed Ion Beam (FIB) machining has been demonstrated to be capable of fabricating nano and micro-structure elements. In this paper we demonstrate techniques to design and fabricate a 45° mirror on the end of both conventional single mode and multi-core fibres (MCF) using FIB processing. The mirror is finished by a two step process: first a scanning process is used to make a rough cut followed by a polishing process to create an optical surface finish. The machined 45° mirror can be accurately aligned with optical fibre core, which avoids issues associated with the alignment of external turning mirror components. Proof-of-concept tests demonstrate that the fabricated structure is capable of measuring two axis displacements interferometrically with a maximum displacement up to 1.0mm and an rms error of ~50nm. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
LanguageEnglish
Title of host publicationFifth European Workshop on Optical Fibre Sensors
EditorsLeszek R. Jaroszewicz
DOIs
Publication statusPublished - 2013
EventFifth European Workshop on Optical Fibre Sensors - , Poland
Duration: 19 May 201322 May 2013

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume8794
ISSN (Print)0277-786X

Workshop

WorkshopFifth European Workshop on Optical Fibre Sensors
CountryPoland
Period19/05/1322/05/13

Fingerprint

machining
ion beams
mirrors
fibers
sensors
polishing
optical fibers
alignment
microstructure
scanning

Keywords

  • ion beams
  • mirrors
  • sensors
  • optical fibers
  • polishing
  • scanning

Cite this

Li, J., Sun, J. N., Miliar, M. M., Ritchie, J. M., Luo, X., Maier, R. R. J., ... MacPherson, W. N. (2013). Focused ion beam machining of an in-fibre 45(SiC) mirror for fibre end sensors. In L. R. Jaroszewicz (Ed.), Fifth European Workshop on Optical Fibre Sensors [879404] (Proceedings of SPIE; Vol. 8794). https://doi.org/10.1117/12.2025714
Li, J. ; Sun, J. N. ; Miliar, M. M. ; Ritchie, J. M. ; Luo, Xichun ; Maier, R. R. J. ; Hand, D. P. ; MacPherson, W. N. / Focused ion beam machining of an in-fibre 45(SiC) mirror for fibre end sensors. Fifth European Workshop on Optical Fibre Sensors . editor / Leszek R. Jaroszewicz. 2013. (Proceedings of SPIE).
@inproceedings{6059c00989604f6f8aba7aec2c3d8f19,
title = "Focused ion beam machining of an in-fibre 45(SiC) mirror for fibre end sensors",
abstract = "Focussed Ion Beam (FIB) machining has been demonstrated to be capable of fabricating nano and micro-structure elements. In this paper we demonstrate techniques to design and fabricate a 45° mirror on the end of both conventional single mode and multi-core fibres (MCF) using FIB processing. The mirror is finished by a two step process: first a scanning process is used to make a rough cut followed by a polishing process to create an optical surface finish. The machined 45° mirror can be accurately aligned with optical fibre core, which avoids issues associated with the alignment of external turning mirror components. Proof-of-concept tests demonstrate that the fabricated structure is capable of measuring two axis displacements interferometrically with a maximum displacement up to 1.0mm and an rms error of ~50nm. {\circledC} (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.",
keywords = "ion beams, mirrors, sensors, optical fibers, polishing, scanning",
author = "J. Li and Sun, {J. N.} and Miliar, {M. M.} and Ritchie, {J. M.} and Xichun Luo and Maier, {R. R. J.} and Hand, {D. P.} and MacPherson, {W. N.}",
year = "2013",
doi = "10.1117/12.2025714",
language = "English",
isbn = "9780819496348",
series = "Proceedings of SPIE",
publisher = "SPIE",
editor = "Jaroszewicz, {Leszek R.}",
booktitle = "Fifth European Workshop on Optical Fibre Sensors",

}

Li, J, Sun, JN, Miliar, MM, Ritchie, JM, Luo, X, Maier, RRJ, Hand, DP & MacPherson, WN 2013, Focused ion beam machining of an in-fibre 45(SiC) mirror for fibre end sensors. in LR Jaroszewicz (ed.), Fifth European Workshop on Optical Fibre Sensors ., 879404, Proceedings of SPIE, vol. 8794, Fifth European Workshop on Optical Fibre Sensors, Poland, 19/05/13. https://doi.org/10.1117/12.2025714

Focused ion beam machining of an in-fibre 45(SiC) mirror for fibre end sensors. / Li, J.; Sun, J. N.; Miliar, M. M.; Ritchie, J. M.; Luo, Xichun; Maier, R. R. J.; Hand, D. P.; MacPherson, W. N.

Fifth European Workshop on Optical Fibre Sensors . ed. / Leszek R. Jaroszewicz. 2013. 879404 (Proceedings of SPIE; Vol. 8794).

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

TY - GEN

T1 - Focused ion beam machining of an in-fibre 45(SiC) mirror for fibre end sensors

AU - Li, J.

AU - Sun, J. N.

AU - Miliar, M. M.

AU - Ritchie, J. M.

AU - Luo, Xichun

AU - Maier, R. R. J.

AU - Hand, D. P.

AU - MacPherson, W. N.

PY - 2013

Y1 - 2013

N2 - Focussed Ion Beam (FIB) machining has been demonstrated to be capable of fabricating nano and micro-structure elements. In this paper we demonstrate techniques to design and fabricate a 45° mirror on the end of both conventional single mode and multi-core fibres (MCF) using FIB processing. The mirror is finished by a two step process: first a scanning process is used to make a rough cut followed by a polishing process to create an optical surface finish. The machined 45° mirror can be accurately aligned with optical fibre core, which avoids issues associated with the alignment of external turning mirror components. Proof-of-concept tests demonstrate that the fabricated structure is capable of measuring two axis displacements interferometrically with a maximum displacement up to 1.0mm and an rms error of ~50nm. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

AB - Focussed Ion Beam (FIB) machining has been demonstrated to be capable of fabricating nano and micro-structure elements. In this paper we demonstrate techniques to design and fabricate a 45° mirror on the end of both conventional single mode and multi-core fibres (MCF) using FIB processing. The mirror is finished by a two step process: first a scanning process is used to make a rough cut followed by a polishing process to create an optical surface finish. The machined 45° mirror can be accurately aligned with optical fibre core, which avoids issues associated with the alignment of external turning mirror components. Proof-of-concept tests demonstrate that the fabricated structure is capable of measuring two axis displacements interferometrically with a maximum displacement up to 1.0mm and an rms error of ~50nm. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

KW - ion beams

KW - mirrors

KW - sensors

KW - optical fibers

KW - polishing

KW - scanning

U2 - 10.1117/12.2025714

DO - 10.1117/12.2025714

M3 - Conference contribution book

SN - 9780819496348

T3 - Proceedings of SPIE

BT - Fifth European Workshop on Optical Fibre Sensors

A2 - Jaroszewicz, Leszek R.

ER -

Li J, Sun JN, Miliar MM, Ritchie JM, Luo X, Maier RRJ et al. Focused ion beam machining of an in-fibre 45(SiC) mirror for fibre end sensors. In Jaroszewicz LR, editor, Fifth European Workshop on Optical Fibre Sensors . 2013. 879404. (Proceedings of SPIE). https://doi.org/10.1117/12.2025714