@inproceedings{6059c00989604f6f8aba7aec2c3d8f19,
title = "Focused ion beam machining of an in-fibre 45(SiC) mirror for fibre end sensors",
abstract = "Focussed Ion Beam (FIB) machining has been demonstrated to be capable of fabricating nano and micro-structure elements. In this paper we demonstrate techniques to design and fabricate a 45° mirror on the end of both conventional single mode and multi-core fibres (MCF) using FIB processing. The mirror is finished by a two step process: first a scanning process is used to make a rough cut followed by a polishing process to create an optical surface finish. The machined 45° mirror can be accurately aligned with optical fibre core, which avoids issues associated with the alignment of external turning mirror components. Proof-of-concept tests demonstrate that the fabricated structure is capable of measuring two axis displacements interferometrically with a maximum displacement up to 1.0mm and an rms error of ~50nm. {\textcopyright} (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.",
keywords = "ion beams, mirrors, sensors, optical fibers, polishing, scanning",
author = "J. Li and Sun, {J. N.} and Miliar, {M. M.} and Ritchie, {J. M.} and Xichun Luo and Maier, {R. R. J.} and Hand, {D. P.} and MacPherson, {W. N.}",
year = "2013",
doi = "10.1117/12.2025714",
language = "English",
isbn = "9780819496348",
series = "Proceedings of SPIE",
publisher = "SPIE",
editor = "Jaroszewicz, {Leszek R.}",
booktitle = "Fifth European Workshop on Optical Fibre Sensors",
note = "Fifth European Workshop on Optical Fibre Sensors ; Conference date: 19-05-2013 Through 22-05-2013",
}