FIB Micro-/Nano-fabrication

Nitul S. Rajput; Xichun Luo

FIB Micro-/Nano-fabrication

Nitul S. Rajput, Xichun Luo

Design, Manufacturing And Engineering Management

Research output: Chapter in Book/Report/Conference proceeding › Chapter

10 Citations (Scopus)

Abstract

Focused Ion Beam (FIB) is one of the state of the art micro/nano fabrication tools. It adopts both bottom-up and top-down approaches to generate micro/nano structures and the biggest advantage of FIB lies in its maskless fabrication capability. The efficacy of the machine is now well proven among the scientific community. Modern FIB systems offer highly focused and precised beam of ions, which are effectively used for fabricating precised, high aspect ratio micro/nano structures.

Original language	English
Title of host publication	Micromanufacturing engineering and technology
Editors	Yi Qin
Publisher	Elsevier Limited
Pages	61-80
Number of pages	20
Edition	2
ISBN (Print)	9780323311496
Publication status	Published - 15 May 2015

Keywords

FIB processing
FIB imaging
nano fabrication
micro fabrication
focused ion beam (FIB)

Cite this

@inbook{115863dd735444d5b52b9213a22f84dd,

title = "FIB Micro-/Nano-fabrication",

abstract = "Focused Ion Beam (FIB) is one of the state of the art micro/nano fabrication tools. It adopts both bottom-up and top-down approaches to generate micro/nano structures and the biggest advantage of FIB lies in its maskless fabrication capability. The efficacy of the machine is now well proven among the scientific community. Modern FIB systems offer highly focused and precised beam of ions, which are effectively used for fabricating precised, high aspect ratio micro/nano structures.",

keywords = "FIB processing, FIB imaging, nano fabrication, micro fabrication, focused ion beam (FIB) ",

author = "Rajput, {Nitul S.} and Xichun Luo",

year = "2015",

month = may,

day = "15",

language = "English",

isbn = "9780323311496",

pages = "61--80",

editor = "Yi Qin",

booktitle = "Micromanufacturing engineering and technology",

publisher = "Elsevier Limited",

address = "United Kingdom",

edition = "2",

}

TY - CHAP

T1 - FIB Micro-/Nano-fabrication

AU - Rajput, Nitul S.

AU - Luo, Xichun

PY - 2015/5/15

Y1 - 2015/5/15

N2 - Focused Ion Beam (FIB) is one of the state of the art micro/nano fabrication tools. It adopts both bottom-up and top-down approaches to generate micro/nano structures and the biggest advantage of FIB lies in its maskless fabrication capability. The efficacy of the machine is now well proven among the scientific community. Modern FIB systems offer highly focused and precised beam of ions, which are effectively used for fabricating precised, high aspect ratio micro/nano structures.

AB - Focused Ion Beam (FIB) is one of the state of the art micro/nano fabrication tools. It adopts both bottom-up and top-down approaches to generate micro/nano structures and the biggest advantage of FIB lies in its maskless fabrication capability. The efficacy of the machine is now well proven among the scientific community. Modern FIB systems offer highly focused and precised beam of ions, which are effectively used for fabricating precised, high aspect ratio micro/nano structures.

KW - FIB processing

KW - FIB imaging

KW - nano fabrication

KW - micro fabrication

KW - focused ion beam (FIB)

UR - http://store.elsevier.com/Micromanufacturing-Engineering-and-Technology/isbn-9780323311496/

M3 - Chapter

SN - 9780323311496

SP - 61

EP - 80

BT - Micromanufacturing engineering and technology

A2 - Qin, Yi

PB - Elsevier Limited

ER -

FIB Micro-/Nano-fabrication

Abstract

Keywords

Other files and links

Fingerprint

Micro-3D: Miniature Flexible & Reconfigurable Manufacturing System for 3D Micro-products

Cite this

FIB Micro-/Nano-fabrication

Abstract

Keywords

Other files and links

Fingerprint

Projects

Micro-3D: Miniature Flexible & Reconfigurable Manufacturing System for 3D Micro-products

Cite this