FIB Micro-/Nano-fabrication

Nitul S. Rajput, Xichun Luo

Research output: Chapter in Book/Report/Conference proceedingChapter

2 Citations (Scopus)

Abstract

Focused Ion Beam (FIB) is one of the state of the art micro/nano fabrication tools. It adopts both bottom-up and top-down approaches to generate micro/nano structures and the biggest advantage of FIB lies in its maskless fabrication capability. The efficacy of the machine is now well proven among the scientific community. Modern FIB systems offer highly focused and precised beam of ions, which are effectively used for fabricating precised, high aspect ratio micro/nano structures.
Original languageEnglish
Title of host publicationMicromanufacturing engineering and technology
EditorsYi Qin
PublisherElsevier Limited
Pages61-80
Number of pages20
Edition2
ISBN (Print)9780323311496
Publication statusPublished - 15 May 2015

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Keywords

  • FIB processing
  • FIB imaging
  • nano fabrication
  • micro fabrication
  • focused ion beam (FIB)

Cite this

Rajput, N. S., & Luo, X. (2015). FIB Micro-/Nano-fabrication. In Y. Qin (Ed.), Micromanufacturing engineering and technology (2 ed., pp. 61-80). Elsevier Limited.