Femtosecond laser micromachining of sapphire

K.S. Kim, D.R. Jones, E.A.J.M. Bente, J.M. Girkin, M.D. Dawson

Research output: Contribution to conferencePaper

3 Citations (Scopus)

Abstract

50 fs pulse laser micromachining of sapphire has been demonstrated. The smooth and clean features and high ablation rate have proven the suitability of this technique for micro-scale machining of this technologically important material

Original languageEnglish
Pages762-763
Number of pages2
DOIs
Publication statusPublished - Nov 2001
Event14th Annual Meeting of the IEEE Lasers-and-Electro-Optics-Society - San Diego, United States
Duration: 11 Nov 200115 Nov 2001

Conference

Conference14th Annual Meeting of the IEEE Lasers-and-Electro-Optics-Society
CountryUnited States
CitySan Diego
Period11/11/0115/11/01

Keywords

  • chemical lasers
  • ultrafast optics
  • power lasers
  • power generation
  • optical pulses
  • micromachining
  • machining
  • laser mode locking
  • laser beams
  • laser ablation

Cite this

Kim, K. S., Jones, D. R., Bente, E. A. J. M., Girkin, J. M., & Dawson, M. D. (2001). Femtosecond laser micromachining of sapphire. 762-763. Paper presented at 14th Annual Meeting of the IEEE Lasers-and-Electro-Optics-Society , San Diego, United States. https://doi.org/10.1109/LEOS.2001.969038