Femtosecond laser machining of gallium nitride

T. Kim, H.S. Kim, M. Hetterich, D. Jones, J.M. Girkin, E. Bente, M.D. Dawson

Research output: Contribution to journalArticle

32 Citations (Scopus)

Abstract

Ultrashort pulse laser ablation of gallium nitride (GaN) has been studied. Utilizing a 1 kHz femtosecond Ti:sapphire laser with a peak intensity of approximately 10(16) W cm(-2), we have successfully demonstrated controlled ablation of metal organic chemical vapour deposition and hydride vapour phase epitaxy grown GaN. Groove patterns 10-100 mum wide and as deep as 30 mum have been produced both in air and in a vacuum chamber and analyzed by scanning electron microscope and stylus profiling. This approach is demonstrated to be highly suitable for micromachining and controlled definition of features on a tens of micron length scale in materials such as GaN which are resistant to wet chemical etching.
LanguageEnglish
Pages262-264
Number of pages3
JournalMaterials Science and Engineering B
Volume82
Issue number1-3
DOIs
Publication statusPublished - 22 May 2001

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Gallium nitride
laser machining
gallium nitrides
Ultrashort pulses
Machining
Organic Chemicals
Ultrafast lasers
Vapor phase epitaxy
Wet etching
Aluminum Oxide
Organic chemicals
Micromachining
Laser ablation
micromachining
vacuum chambers
Ablation
Sapphire
Hydrides
vapor phase epitaxy
grooves

Keywords

  • laser ablation
  • femtosecond pulse laser
  • gallium nitride

Cite this

Kim, T., Kim, H. S., Hetterich, M., Jones, D., Girkin, J. M., Bente, E., & Dawson, M. D. (2001). Femtosecond laser machining of gallium nitride. Materials Science and Engineering B, 82(1-3), 262-264. https://doi.org/10.1016/S0921-5107(00)00790-X
Kim, T. ; Kim, H.S. ; Hetterich, M. ; Jones, D. ; Girkin, J.M. ; Bente, E. ; Dawson, M.D. / Femtosecond laser machining of gallium nitride. In: Materials Science and Engineering B. 2001 ; Vol. 82, No. 1-3. pp. 262-264.
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Kim, T, Kim, HS, Hetterich, M, Jones, D, Girkin, JM, Bente, E & Dawson, MD 2001, 'Femtosecond laser machining of gallium nitride' Materials Science and Engineering B, vol. 82, no. 1-3, pp. 262-264. https://doi.org/10.1016/S0921-5107(00)00790-X

Femtosecond laser machining of gallium nitride. / Kim, T.; Kim, H.S.; Hetterich, M.; Jones, D.; Girkin, J.M.; Bente, E.; Dawson, M.D.

In: Materials Science and Engineering B, Vol. 82, No. 1-3, 22.05.2001, p. 262-264.

Research output: Contribution to journalArticle

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T1 - Femtosecond laser machining of gallium nitride

AU - Kim, T.

AU - Kim, H.S.

AU - Hetterich, M.

AU - Jones, D.

AU - Girkin, J.M.

AU - Bente, E.

AU - Dawson, M.D.

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KW - laser ablation

KW - femtosecond pulse laser

KW - gallium nitride

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Kim T, Kim HS, Hetterich M, Jones D, Girkin JM, Bente E et al. Femtosecond laser machining of gallium nitride. Materials Science and Engineering B. 2001 May 22;82(1-3):262-264. https://doi.org/10.1016/S0921-5107(00)00790-X