Fast piezoelectric scanning MEMS mirror for 1D ion adressing

Paul Janin, Ralf Bauer, Paul Griffin, Erling Riis, Deepak Uttamchandani

Research output: Contribution to conference › Abstract › peer-review

4 Citations (Scopus)

88 Downloads (Pure)

4 Citations
1 Conference contribution book
1 Paper

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2018
Characterization of a fast piezoelectric varifocal MEMS mirror
Janin, P., Bauer, R., Griffin, P., Riis, E. & Uttamchandani, D., 29 Jul 2018. 2 p.
Research output: Contribution to conference › Paper › peer-review

Open Access
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6 Citations (Scopus)

91 Downloads (Pure)