Fast piezoelectric scanning MEMS mirror for 1D ion adressing

Paul Janin, Ralf Bauer, Paul Griffin, Erling Riis, Deepak Uttamchandani

Research output: Contribution to conference › Abstract › peer-review

4 Citations (Scopus)

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2021
A high-frequency tunable piezoelectric MEMS scanner for fast addressing applications
Janin, P., Bauer, R., Griffin, P., Riis, E. & Uttamchandani, D., 25 Jan 2021, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). New York, USA: IEEE, p. 294-297 4 p. (IEEE International Conference on Micro Electrical Mechanical Systems (MEMS)).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

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1 Citation (Scopus)

62 Downloads (Pure)